#=============================================== # TkOpticalSpectrumRT #=============================================== package TkOpticalSpectrumRT; use clib::TkEllipsometry; @ISA = qw(TkEllipsometry); #公開したいサブルーチン #@EXPORT = qw(DelSpace Reduce01 MakePath RegExpQuote); use strict; my $pi = Sci::pi(); my $kB = Sci::kB(); my $c = Sci::c(); my $e = Sci::e(); my $e0 = Sci::e0(); my $me = Sci::me(); my $mp = Sci::mp(); my $mn = Sci::mn(); my $h = Sci::h(); my $hbar = Sci::hbar(); my $torad = Sci::torad(); my $todeg = Sci::todeg(); #============================================================ # 変数等取得関数 #============================================================ #============================================================ # コンストラクタ、デストラクタ #============================================================ #============================================================ # 継承クラスで定義しなおす関数 #============================================================ sub CreateWidgets { my ($this) = @_; my $App = $this->App(); my $args = $App->Args(); my $mw = $this->mw(); $this->{ini} = new IniFile(undef, 0, 0); $this->{dini} = new IniFile(undef, 0, 0); $this->{Ellipsometry} = new Ellipsometry; $this->{nLorentz} = 5 if(!defined $this->{nLorentz}); $this->{nDrude} = 1 if(!defined $this->{nDrude}); $this->SUPER::CreateWidgets(1); $this->mw()->SetTitle("OpticalSpectrumFit2007 for RT / TkPlot"); $this->App()->SetProgram("OpticalSpectrumFit2007 for RT / TkPlot"); #=================================================== # ペインを作製 #=================================================== my $EntryWidth = 12; my $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); $this->MakeChooseFileEntry($Frame, 'Param', 'Param:', $this->{ini}->pVariable("ParameterFile", ""), '&Choose', sub { $this->ChooseFile(@_); }, "ChooseParameterFile"); $this->{SaveParamButton} = $Frame->MyButton( -text => '&Save', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'SaveParam'); }, )->pack(-side => 'left'); $this->{EditParamButton} = $Frame->MyButton( -text => 'ed', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'EditParam'); }, )->pack(-side => 'left'); $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); $this->MakeChooseFileEntry($Frame, 'SampleCSV', 'Sample:', $this->{ini}->pVariable("SampleCSVFile", ""), '&Choose', sub { $this->ChooseFile(@_); }, "ChooseSampleFile"); $this->{EditDataButton} = $Frame->MyButton( -text => 'ed', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'EditSampleCSV'); }, )->pack(-side => 'left'); $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); $this->MakeChooseFileEntry($Frame, 'SubstrateCSV', 'Substrate:', $this->{ini}->pVariable("SubstrateCSVFile", ""), '&Choose', sub { $this->ChooseFile(@_); }, "ChooseSubstrateFile"); $this->{EditDataButton} = $Frame->MyButton( -text => 'ed', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'EditSubstrateCSV'); }, )->pack(-side => 'left'); $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); my $lsb1 = $this->{ChooseXListBox} = $Frame->MyBrowseEntry( -label => "X:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => [], -SelIndex => 0, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $lsb1->configure(-browsecmd => [\&SelChangeListBox, $this, "X", $this->{ChooseXListBox}]); my $lsb2 = $this->{ChooseY1ListBox} = $Frame->MyBrowseEntry( -label => "Y1:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => [], -SelIndex => 1, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $lsb2->configure(-browsecmd => [\&SelChangeListBox, $this, "Y1", $this->{ChooseY1ListBox}]); my $lsb3 = $this->{ChooseY2ListBox} = $Frame->MyBrowseEntry( -label => "Y2:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => [], -SelIndex => 2, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $lsb3->configure(-browsecmd => [\&SelChangeListBox, $this, "Y2", $this->{ChooseY2ListBox}]); $Frame = $mw->MyLabFrame( -label => 'Fitting1', -labelside => 'acrosstop', )->pack(-anchor => 'nw', -fill => 'x'); my $lsb4 = $this->{ChooseLSQMethodListBox} = $Frame->MyBrowseEntry( -label => "LSQ Method:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => ['Amoeba::Simplex', 'PDL::Simplex', 'ModifiedNewton'], -SelIndex => 0, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $lsb4->configure(-browsecmd => [\&SelChangeListBox, $this, "LSQMethod", $this->{ChooseLSQMethodListBox}]); my $lsb5 = $this->{ChooseFitToListBox} = $Frame->MyBrowseEntry( -label => "Fit to:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => ['RT', 'R', 'T'], -SelIndex => 0, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $Frame = $mw->MyLabFrame( -label => 'Fitting2', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeLabelEntry($Frame, "FitEmin", "Emin:", $this->{ini}->pVariable('FitEmin', ''), "%s", $EntryWidth, "eV", 0, 0); $this->MakeLabelEntry($Frame, "FitEmax", "Emax:", $this->{ini}->pVariable('FitEmax', ''), "%s", $EntryWidth, "eV", 0, 1); $this->MakeLabelEntry($Frame, "nSkipData", "nSkip:", $this->{ini}->pVariable('nSkipData', 2), "%d", $EntryWidth, "", 0, 2); $this->MakeLabelEntry($Frame, "EPS", "EPS:", $this->{ini}->pVariable('EPS', 1.0e-5), "%12.4g", $EntryWidth, "", 1, 0); $this->MakeLabelEntry($Frame, "nMaxIter", "MaxIter:", $this->{ini}->pVariable('nMaxIter', 1000), "%d", $EntryWidth, "", 1, 1); $this->MakeLabelEntry($Frame, "nSaveSpectraInterval", "SaveIntvl:", $this->{ini}->pVariable('nSaveSpectraInterval', 10), "%d", $EntryWidth, "", 1, 2); $Frame = $mw->MyLabFrame( -label => 'Structure', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); my $Frame1 = $Frame->MyFrame()->pack(-anchor => 'nw'); $this->MakeLabelEntry($Frame1, "Angle", "Angle:", $this->{ini}->pVariable('Angle', 0.0), "%8.4f", $EntryWidth, "deg", 0, 0); my $lsb6 = $this->{ChooseLayerModelListBox} = $Frame1->MyBrowseEntry( -label => "Layer Model:", -state => "readonly", -takefocus => 1, -width => 20, -Selections => ["Film/Substrate", "Surface(EMA)/Film/Substrate", "Film/Interface(EMA)/Substrate"], -SelIndex => 0, )->grid(-row => 0, -column => 3, -columnspan => 1, -sticky => 'e' ); $lsb6->configure(-browsecmd => [\&SelChangeListBox, $this, "LayerModel", $this->{ChooseLayerModelListBox}]); $Frame1 = $Frame->MyFrame()->pack(-anchor => 'nw'); $this->MakeCheckEntry($Frame1, "SurfaceThickness", "Surface thickness:", $this->{dini}->pVariable('SurfaceThicknesscheck', 1), $this->{ini}->pVariable('SurfaceThickness', 0.0), "%12.6g", $EntryWidth, "nm", 0, 0); $this->MakeCheckEntry($Frame1, "SurfaceVf", "Vf:", $this->{dini}->pVariable('SurfaceVfcheck', 0), $this->{ini}->pVariable('SurfaceVf', 1.0), "%12.6g", $EntryWidth, "", 0, 1); $this->MakeCheckEntry($Frame1, "FilmThickness", "Film thickness:", $this->{dini}->pVariable('FilmThicknesscheck', 1), $this->{ini}->pVariable('FilmThickness', 100.0), "%12.6g", $EntryWidth, "nm", 1, 0); $Frame1 = $Frame->MyFrame()->pack(-anchor => 'nw'); $this->MakeCheckEntry($Frame1, "SubstrateThickness", "Substrate thickness:", $this->{dini}->pVariable('SubstrateThicknesscheck', 0), $this->{ini}->pVariable('SubstrateThickness', 0.5), "%12.6g", $EntryWidth, "mm", 0, 1); $Frame1 = $Frame->MyFrame()->pack(-anchor => 'nw'); $Frame = $mw->MyLabFrame( -label => 'Scattering', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeCheckEntry($Frame, "Scale", "scale:", $this->{dini}->pVariable('Scalecheck', 0) , $this->{ini}->pVariable('Scale', 1.0), "%12.6g", $EntryWidth, "", 0, 0); $this->MakeCheckEntry($Frame, "Rayleighl0", "Rayleigh lamba0:", $this->{dini}->pVariable('Rayleighl0check', 0) , $this->{ini}->pVariable('Rayleighl0', 0.0), "%12.6g", $EntryWidth, "", 0, 1); $Frame = $mw->MyLabFrame( -label => 'Dielectric background', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeCheckEntry($Frame, "e1inf", "e1:", $this->{dini}->pVariable('e1infcheck', 1) , $this->{ini}->pVariable('e1inf', 0.155), "%12.6g", $EntryWidth, "e0", 0, 0); $this->MakeCheckEntry($Frame, "e2inf", "e2:", $this->{dini}->pVariable('e2infcheck', 0) , $this->{ini}->pVariable('e2inf', 0.0 ), "%12.6g", $EntryWidth, "e0", 0, 1); $this->MakeCheckEntry($Frame, "Caucy2", "Caucy2:", $this->{dini}->pVariable('Caucy2check', 0) , $this->{ini}->pVariable('Caucy2', 0.0), "%12.6g", $EntryWidth, "", 1, 0); $this->MakeCheckEntry($Frame, "Caucy4", "Caucy4:", $this->{dini}->pVariable('Caucy4check', 0) , $this->{ini}->pVariable('Caucy4', 0.0), "%12.6g", $EntryWidth, "", 1, 1); $Frame = $mw->MyLabFrame( -label => 'Tauc-Lorentz', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeCheckEntry($Frame, "A", "A:", $this->{dini}->pVariable('Acheck', 1) , $this->{ini}->pVariable('A', 122.8), "%12.6g", $EntryWidth, "", 0, 0); $this->MakeCheckEntry($Frame, "C", "C:", $this->{dini}->pVariable('Ccheck', 1) , $this->{ini}->pVariable('C', 10.8), "%12.6g", $EntryWidth, "", 0, 1); $this->MakeCheckEntry($Frame, "Eg", "Eg:", $this->{dini}->pVariable('Egcheck', 1) , $this->{ini}->pVariable('Eg', 4.4), "%12.6g", $EntryWidth, "eV", 1, 0); $this->MakeCheckEntry($Frame, "En0", "En0:", $this->{dini}->pVariable('En0check', 1) , $this->{ini}->pVariable('En0', 155.9), "%12.6g", $EntryWidth, "eV", 1, 1); $Frame = $mw->MyLabFrame( -label => "Lorentz", -labelside => 'acrosstop', )->pack(-anchor => 'nw'); for(my $i = 0 ; $i < $this->{nLorentz} ; $i++) { my $i1 = $i + 1; $this->MakeCheckEntry($Frame, "E0${i1}", "E0:", $this->{dini}->pVariable("E0${i1}check", 1) , $this->{ini}->pVariable("E0${i1}", 2.64), "%12.6g", $EntryWidth, "eV", $i, 0); $this->MakeCheckEntry($Frame, "Ne${i1}", "Ne:", $this->{dini}->pVariable("Ne${i1}check", 1) , $this->{ini}->pVariable("Ne${i1}", 2e26), "%12.6g", $EntryWidth, "m-3", $i, 1); $this->MakeCheckEntry($Frame, "G${i1}", "G:", $this->{dini}->pVariable("G${i1}check", 1) , $this->{ini}->pVariable("G${i1}", 2.64), "%12.6g", $EntryWidth, "eV", $i, 2); } $Frame = $mw->MyLabFrame( -label => "Drude", -labelside => 'acrosstop', )->pack(-anchor => 'nw'); for(my $i = 0 ; $i < $this->{nDrude} ; $i++) { my $i1 = $i + 1; $this->MakeCheckEntry($Frame, "DrudeEp${i1}", "Ep:", $this->{dini}->pVariable("DrudeEp${i1}check", 1) , $this->{ini}->pVariable("DrudeEp${i1}", 0.5), "%12.6g", $EntryWidth, "eV", $i, 1); $this->MakeCheckEntry($Frame, "Drudetau${i1}", "tau:", $this->{dini}->pVariable("Drudetau${i1}check", 1) , $this->{ini}->pVariable("Drudetau${i1}", 1.0e-14), "%12.6g", $EntryWidth, "s", $i, 2); } $Frame = $mw->MyLabFrame( -label => "Point by Point", -labelside => 'acrosstop', )->pack(-anchor => 'nw'); my $button = $Frame->MyCheckbutton( -text => "Allow Negative e2", -variable => $this->{ini}->pVariable("PbPAllowNegativeE2", 0), -onvalue => 1, -offvalue => 0, -indicatoron => 'no', )->pack(-anchor => 'nw')+ $this->UpdateParameters(); $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); $this->{RecalcButton} = $Frame->MyButton( -text => 'Re&calc', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'Recalc'); }, )->pack(-side => 'left'); $this->{FitButton} = $Frame->MyButton( -text => '&Fit', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'Fit'); }, )->pack(-side => 'left'); $this->{PointByPointButton} = $Frame->MyButton( -text => 'Point By Point', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'PointByPoint'); }, )->pack(-side => 'left'); $this->{SaveForSCOUTButton} = $Frame->MyButton( -text => 'Save for &SCOUT', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'SaveForSCOUT'); }, )->pack(-side => 'left'); $this->{SaveLayersButton} = $Frame->MyButton( -text => 'Save Layers', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'SaveLayers'); }, )->pack(-side => 'left'); #ツールバーのOpenボタンをファイル読み込みにバインドする $mw->{OpenButton}->configure( -command => sub { $this->ChooseFile('SampleCSVFile', $this->{SPEFileFileEntry}); }, ) if($mw->{OpenButton}); } sub SelChangeListBox { my ($this, $type, $lb) = @_; #print "this:$this lb=$lb\n"; my $s = $lb->GetText(); if($type eq 'LayerModel') { if($s eq "Surface(EMA)/Film/Substrate") { $this->{SurfaceThicknessButton}->SetText("Surface thickness:"); } elsif($s eq "Film/Interface(EMA)/Substrate") { $this->{SurfaceThicknessButton}->SetText("Interface thickness:"); } else { } } # $this->CreateGraphFrame(); $this->AssignGraphData(); $this->Draw(); } #=================================================== # データ処理 #=================================================== sub BuildLayerModel { my ($this, $IsPrint, $BuildOptimize) = @_; $IsPrint = 1 if(!defined $IsPrint); $BuildOptimize = 1 if(!defined $BuildOptimize); my $ini = $this->{ini}; my $dini = $this->{dini}; my $el = $this->{Ellipsometry}; my $optics = new Optics; my $Layers = new MultiLayer; $Layers->SetIncidentAngle($ini->{Angle}); my $pObsE = $el->GetData('.*eV.*', '.*E.*'); my $pObsPsi = $el->GetData('Psi'); my $pObsDelta = $el->GetData('Delta'); my $pObsEps1 = $el->GetData('e1'); my $pObsEps2 = $el->GetData('e2'); my $pObsR = $el->GetData('R'); my $pObsT = $el->GetData('T'); my $nData = @$pObsE; my $nE = $nData; $ini->{FitEmin} = $pObsE->[0] if($ini->{FitEmin} eq ''); $ini->{FitEmax} = $pObsE->[$nData-1] if($ini->{FitEmax} eq ''); my $Emin = $ini->{FitEmin}; my $Emax = $ini->{FitEmax}; my $Estep = $pObsE->[1] - $pObsE->[0]; $Estep = 0.05 if(!defined $Estep); $nData = int( ($Emax - $Emin) / $Estep + 1.001); my $Air = new OpticalMaterial("air"); my $Surface = new OpticalMaterial("Specify", "Surface"); my $Film = new OpticalMaterial("Specify", "Film"); my $Substrate = new OpticalMaterial("Specify", "Substrate"); $Surface->AddDielectricModel( "EMA1", "EMA", "Model", "Average", "pMaterials", [$Film, $Air], "pVolumeFractions", [$ini->{SurfaceVf}, 1.0 - $ini->{SurfaceVf}], ); $Film->AddDielectricModel( "Constant1", "Constant", "e1inf", $ini->{e1inf}, "e2inf", $ini->{e2inf}, ); $Film->AddDielectricModel( "TaucLorentz1", "TaucLorentz", "A", $ini->{A}, "Eg", $ini->{Eg}, "En0", $ini->{En0}, "C", $ini->{C} ); $Film->AddDielectricModel( "Caucy1", "Caucy", "pA", [$ini->{Caucy2}, $ini->{Caucy4}], "pn", [2, 4], ); for(my $i = 0 ; $i < $this->{nLorentz} ; $i++) { my $i1 = $i + 1; $Film->AddDielectricModel( "Lorentz$i1", "Lorentz", "Ne", $ini->{"Ne$i1"}, "E0", $ini->{"E0$i1"}, "G", $ini->{"G$i1"}, ); } for(my $i = 0 ; $i < $this->{nDrude} ; $i++) { my $i1 = $i + 1; $Film->AddDielectricModel( "Drude$i1", "Drude", "Ep", $ini->{"DrudeEp$i1"}, "tau", $ini->{"Drudetau$i1"}, ); } if($ini->{SubstrateCSVFile}) { my @ret = $Substrate->AddDielectricModel( "Substrate", "EFile", "Path", $ini->{SubstrateCSVFile}, ); if(@ret == 0) { print "Error: Can not read [$ini->{SubstrateCSVFile}].\n"; return; } } $Layers->AddLayer($Air, -1.0, 0.0); if($this->{ChooseLayerModelListBox}->GetText() eq "Surface(EMA)/Film/Substrate") { $Layers->AddLayer($Surface, $ini->{SurfaceThickness}*1.0e-9, 1.0); } $Layers->AddLayer($Film, $ini->{FilmThickness}*1.0e-9, 1.0); if($this->{ChooseLayerModelListBox}->GetText() eq "Film/Interface(EMA)/Substrate") { $Layers->AddLayer($Surface, $ini->{SurfaceThickness}*1.0e-9, 1.0); } $Layers->AddLayer($Substrate, $ini->{SubstrateThickness}*1.0e-3, 0.0); $Layers->AddLayer($Air, -1.0, 0.0); $this->{Layers} = $Layers; $Layers->PrintLayers() if($IsPrint); #========================================================= # フィッティング設定 #========================================================= return if(!$BuildOptimize); my $ppA = $Film->pVariable('Caucy1::pA'); my $pA = $$ppA; my $ppV = $Surface->pVariable('EMA1::pVolumeFractions'); my $pV = $$ppV; my $optimize = new Optimize(); $optimize->AddParameters( "Scale", \$ini->{Scale}, $dini->{Scalecheck}, $dini->{Scalescale}, $dini->{Scalemin}, $dini->{Scalemax}, sub { $ini->{Scale} = $_[0]; }, "Rayleighl0", \$ini->{Rayleighl0}, $dini->{Rayleighl0check}, $dini->{Rayleighl0scale}, $dini->{Rayleighl0min}, $dini->{Rayleighl0max}, sub { $ini->{Rayleighl0} = $_[0]; }, ); my $iFilm = 1; my $iSubstrate = 2; if($this->{ChooseLayerModelListBox}->GetText() eq "Surface(EMA)/Film/Substrate") { $iFilm++; $iSubstrate++; $optimize->AddParameters( "SurfaceThickness", $Layers->pLayerThickness(1), $dini->{SurfaceThicknesscheck}, $dini->{SurfaceThicknessscale}, $dini->{SurfaceThicknessmin}, $dini->{SurfaceThicknessmax}, sub { $Layers->SetLayerThickness(1, $_[0]); $ini->{SurfaceThickness} = $_[0]*1.0e9; }, "SurfaceVf", \$ini->{SurfaceVf}, $dini->{SurfaceVfcheck}, $dini->{SurfaceVfscale}, $dini->{SurfaceVfmin}, $dini->{SurfaceVfmax}, sub { $pV->[0] = $_[0]; $pV->[1] = 1.0 - $_[0]; $ini->{SurfaceVf} = $_[0]; }, ); }; if($this->{ChooseLayerModelListBox}->GetText() eq "Film/Interface(EMA)/Substrate") { $iSubstrate++; } $optimize->AddParameters( "FilmThickness", $Layers->pLayerThickness($iFilm), $dini->{FilmThicknesscheck}, $dini->{FilmThicknessscale}, $dini->{FilmThicknessmin}, $dini->{FilmThicknessmax}, sub { $Layers->SetLayerThickness($iFilm, $_[0]); $ini->{FilmThickness} = $_[0]*1.0e9; }, "SubstrateThickness", $Layers->pLayerThickness($iSubstrate), $dini->{SubstrateThicknesscheck}, $dini->{SubstrateThicknessscale}, $dini->{SubstrateThicknessmin}, $dini->{SubstrateThicknessmax}, sub { $Layers->SetLayerThickness($iSubstrate, $_[0]); $ini->{SubstrateThickness} = $_[0]*1.0e3; }, "Film-e1", $Layers->pVariable($iFilm, 'Constant1::e1inf'), $dini->{e1infcheck}, $dini->{e1infscale}, $dini->{e1infmin}, $dini->{e1infmax}, sub { $Layers->SetVariable($iFilm, 'Constant1::e1inf', $_[0]); $ini->{e1inf} = $_[0]; }, "Film-e2", $Layers->pVariable($iFilm, 'Constant1::e2inf'), $dini->{e2infcheck}, $dini->{e2infscale}, $dini->{e2infmin}, $dini->{e2infmax}, sub { $Layers->SetVariable($iFilm, 'Constant1::e2inf', $_[0]); $ini->{e2inf} = $_[0]; }, "Film-Caucy2", \$pA->[0], $dini->{Caucy2check}, $dini->{Caucy2scale}, $dini->{Caucy2min}, $dini->{Caucy2max}, sub { $ini->{Caucy2} = $pA->[0] = $_[0]; }, "Film-Caucy4", \$pA->[1], $dini->{Caucy4check}, $dini->{Caucy4scale}, $dini->{Caucy4min}, $dini->{Caucy4max}, sub { $ini->{Caucy4} = $pA->[1] = $_[0]; }, "Film-TLA", $Layers->pVariable($iFilm, 'TaucLorentz1::A'), $dini->{Acheck}, $dini->{Ascale}, $dini->{Amin}, $dini->{Amax}, sub { $Layers->SetVariable($iFilm, 'TaucLorentz1::A', $_[0]); $ini->{A} = $_[0]; }, "Film-TLC", $Layers->pVariable($iFilm, 'TaucLorentz1::C'), $dini->{Ccheck}, $dini->{Cscale}, $dini->{Cmin}, $dini->{Cmax}, sub { $Layers->SetVariable($iFilm, 'TaucLorentz1::C', $_[0]); $ini->{C} = $_[0]; }, "Film-TLEg", $Layers->pVariable($iFilm, 'TaucLorentz1::Eg'), $dini->{Egcheck}, $dini->{Egscale}, $dini->{Egmin}, $dini->{Egmax}, sub { $Layers->SetVariable($iFilm, 'TaucLorentz1::Eg', $_[0]); $ini->{Eg} = $_[0]; }, "Film-TLEn0", $Layers->pVariable($iFilm, 'TaucLorentz1::En0'), $dini->{En0check}, $dini->{En0scale}, $dini->{En0min}, $dini->{En0max}, sub { $Layers->SetVariable($iFilm, 'TaucLorentz1::En0', $_[0]); $ini->{En0} = $_[0]; }, ); for(my $i = 0 ; $i < $this->{nLorentz} ; $i++) { my $i1 = $i + 1; $optimize->AddParameters( "Film-L${i1}E0", $Layers->pVariable($iFilm, "Lorentz${i1}::E0"), $dini->{"E0${i1}check"}, $dini->{"E0${i1}scale"}, $dini->{"E0${i1}min"}, $dini->{"E0${i1}max"}, sub { $Layers->SetVariable($iFilm, "Lorentz${i1}::E0", $_[0]); $ini->{"E0${i1}"} = $_[0]; }, "Film-L${i1}Ne", $Layers->pVariable($iFilm, "Lorentz${i1}::Ne"), $dini->{"Ne${i1}check"}, $dini->{"Ne${i1}scale"}, $dini->{"Ne${i1}min"}, $dini->{"Ne${i1}max"}, sub { $Layers->SetVariable($iFilm, "Lorentz${i1}::Ne", $_[0]); $ini->{"Ne${i1}"} = $_[0]; $ini->{"A${i1}"} = $optics->CalLorentzAfromNe($ini->{"Ne${i1}"}, 1.0); }, "Film-L${i1}G", $Layers->pVariable($iFilm, "Lorentz${i1}::G"), $dini->{"G${i1}check"}, $dini->{"G${i1}scale"}, $dini->{"G${i1}min"}, $dini->{"G${i1}max"}, sub { $Layers->SetVariable($iFilm, "Lorentz${i1}::G", $_[0]); $ini->{"G${i1}"} = $_[0]; }, ); } for(my $i = 0 ; $i < $this->{nDrude} ; $i++) { my $i1 = $i + 1; $optimize->AddParameters( "Film-D${i1}Ep", $Layers->pVariable($iFilm, "Drude${i1}::Ep"), $dini->{"DrudeEp${i1}check"}, $dini->{"DrudeEp${i1}scale"}, $dini->{"DrudeEp${i1}min"}, $dini->{"DrudeEp${i1}max"}, sub { $Layers->SetVariable($iFilm, "Drude${i1}::Ep", $_[0]); $ini->{"DrudeEp${i1}"} = $_[0]; }, "Film-D${i1}tau", $Layers->pVariable($iFilm, "Drude${i1}::tau"), $dini->{"Drudetau${i1}check"}, $dini->{"Drudetau${i1}scale"}, $dini->{"Drudetau${i1}min"}, $dini->{"Drudetau${i1}max"}, sub { $Layers->SetVariable($iFilm, "Drude${i1}::tau", $_[0]); $ini->{"Drudetau${i1}"} = $_[0]; }, ); } if($this->{ChooseLayerModelListBox}->GetText() eq "Film/Interface(EMA)/Substrate") { $optimize->AddParameters( "SurfaceThickness", $Layers->pLayerThickness(2), $dini->{SurfaceThicknesscheck}, $dini->{SurfaceThicknessscale}, $dini->{SurfaceThicknessmin}, $dini->{SurfaceThicknessmax}, sub { $Layers->SetLayerThickness(2, $_[0]); $ini->{SurfaceThickness} = $_[0]*1.0e9; }, "SurfaceVf", \$ini->{SurfaceVf}, $dini->{SurfaceVfcheck}, $dini->{SurfaceVfscale}, $dini->{SurfaceVfmin}, $dini->{SurfaceVfmax}, sub { $pV->[0] = $_[0]; $pV->[1] = 1.0 - $_[0]; $ini->{SurfaceVf} = $_[0]; }, ); }; $this->{Optimize} = $optimize; } sub Recalc { my ($this) = @_; $this->UpdateParameters(); $this->BuildLayerModel(1, 0); my $el = $this->{Ellipsometry}; my $Layers = $this->{Layers}; my $pObsE = $el->GetData('.*eV.*', '.*E.*'); my $pObsR = $el->GetData('R.*'); my $pObsT = $el->GetData('T.*'); my $FitTo = $this->{ChooseFitToListBox}->GetText(); my ($pE, $pR, $pT, $S2) = $this->CalRTArrays($Layers, $pObsE, $pObsR, $pObsT, $FitTo); $this->{pEArray} = $pE; $this->{pRArray} = $pR; $this->{pTArray} = $pT; $this->App()->print("Recalc: S2=$S2\n"); $this->SetS2($S2); return $S2; } sub PointByPoint { my ($this) = @_; my $App = $this->App(); my $ini = $this->{ini}; my $el = $this->{Ellipsometry}; $this->UpdateParameters(); $this->BuildLayerModel(0, 0); my $Layers = new MultiLayer; $Layers->SetIncidentAngle($ini->{Angle}); my $Air = new OpticalMaterial("air"); my $Film = new OpticalMaterial("Specify", "Film"); my $Substrate = new OpticalMaterial("Specify", "Substrate"); $Film->AddDielectricModel( "Constant1", "Constant", "e1inf", $ini->{e1inf}, "e2inf", $ini->{e2inf}, ); if($ini->{SubstrateCSVFile}) { my @ret = $Substrate->AddDielectricModel( "Substrate", "EFile", "Path", $ini->{SubstrateCSVFile}, ); if(@ret == 0) { print "Error: Can not read [$ini->{SubstrateCSVFile}].\n"; return; } } $Layers->AddLayer($Air, -1.0, 0.0); $Layers->AddLayer($Film, $ini->{FilmThickness}*1.0e-9, 1.0); $Layers->AddLayer($Substrate, $ini->{SubstrateThickness}*1.0e-3, 0.0); $Layers->AddLayer($Air, -1.0, 0.0); my $pObsE = $el->GetData('.*eV.*', '.*E.*'); my $pObsR = $el->GetData('R.*'); my $pObsT = $el->GetData('T.*'); my $nData = @$pObsE; my $IniSubstrate = $this->{Layers}->pLayer(1); my $Method = $this->{ChooseLSQMethodListBox}->GetText(); my $FitTo = $this->{ChooseFitToListBox}->GetText(); my (@PbPE, @PbPe1, @PbPe2, @PbPR, @PbPT, @PbPS2); my $c = 0; my ($e1ini, $e2ini); for(my $i = 0 ; $i < $nData ; $i++) { next if($ini->{nSkipData} > 0 and $i % $ini->{nSkipData} != 0); my $E = $pObsE->[$i]; next if($E < $ini->{FitEmin} or $ini->{FitEmax} < $E); my $lwl = $ini->{Rayleighl0} / Optics::eVTonm($E); my $lwl2 = $lwl * $lwl; my $sf = $ini->{Scale} - $lwl2 * $lwl2; ($e1ini, $e2ini) = $IniSubstrate->CalEps($E); my ($e1opt, $e2opt) = ($e1ini, $e2ini); my $optimize = new Optimize(); $optimize->AddParameters( "e1", \$e1opt, 1, 0.1, '', '', sub { $Layers->SetVariable(1, 'Constant1::e1inf', $_[0]); $e1opt = $_[0]; }, "e2", \$e2opt, 1, 0.1, '', '', sub { $Layers->SetVariable(1, 'Constant1::e2inf', $_[0]); $e2opt = $_[0]; }, ); my ($OptVars, $MinVal) = $optimize->Optimize( $Method, undef, undef, undef, $ini->{EPS}, $ini->{nMaxIter}, $ini->{iPrintLevel}, sub { $this->CalS2ForPontByPonint($optimize, $FitTo, $Layers, $E, $pObsR->[$i] * $sf, $pObsT->[$i] * $sf, @_); }, undef, sub { Optimize::BuildDifferentialMatrixes(@_); }, ); if($MinVal > 1.0e-15 and $c >= 1) { $App->printf("%6.2f: (%10.4g,%10.4g) => (%10.4g,%10.4g) [%10.4g] XXX\n", $E, $e1ini, $e2ini, $e1opt, $e2opt, $MinVal); ($e1ini, $e2ini) = ($PbPe1[$c-1], $PbPe2[$c-1]); # $App->printf("%8s(%10.4g,%10.4g)\n", ' Try '$e1ini, $e2ini); my ($OptVars2, $MinVal2) = $optimize->Optimize( $Method, undef, undef, undef, $ini->{EPS}, $ini->{nMaxIter}, $ini->{iPrintLevel}, sub { $this->CalS2ForPontByPonint($optimize, $FitTo, $Layers, $E, $pObsR->[$i] * $sf, $pObsT->[$i] * $sf, @_); }, undef, sub { Optimize::BuildDifferentialMatrixes(@_); }, ); if($MinVal2 < $MinVal) { $MinVal = $MinVal2; for(my $i = 0 ; $i < @$OptVars ; $i++) { $OptVars->[$i] = $OptVars2->[$i]; } } } $optimize->RecoverParameters($OptVars); $App->printf("%6.2f: (%10.4g,%10.4g) => (%10.4g,%10.4g) [%10.4g]\n", $E, $e1ini, $e2ini, $e1opt, $e2opt, $MinVal); my ($Rtots, $Rtotp, $Ttots, $Ttotp) = $this->CalRT($E, $Layers); my $Rcal = ($Rtots + $Rtotp) / 2.0; my $Tcal = ($Ttots + $Ttotp) / 2.0; $PbPE[$c] = $E; $PbPe1[$c] = $e1opt; $PbPe2[$c] = $e2opt; $PbPR[$c] = $Rcal; $PbPT[$c] = $Tcal; $PbPS2[$c] = $MinVal; ($e1ini, $e2ini) = ($e1opt, $e2opt); $c++; } $this->{PbPE} = \@PbPE; $this->{PbPe1} = \@PbPe1; $this->{PbPe2} = \@PbPe2; $this->{PbPR} = \@PbPR; $this->{PbPT} = \@PbPT; $this->{PbPS2} = \@PbPS2; } sub CalS2ForPontByPonint { my ($this, $optimize, $FitTo, $Layers, $E, $R, $T, $pVars, $iPrintLevel) = @_; my $ini = $this->{ini}; $optimize->RecoverParameters($pVars); my ($e1, $e2) = $Layers->pLayer(1)->CalEps($E); return 1.0e10 if(!$ini->{PbPAllowNegativeE2} and $e2 < 0.0); my ($Rtots, $Rtotp, $Ttots, $Ttotp) = $this->CalRT($E, $Layers); my $Rcal = ($Rtots + $Rtotp) / 2.0; my $Tcal = ($Ttots + $Ttotp) / 2.0; #print "E=$E: e=($e1,$e2) R=($R,$T) / ($Rcal,$Tcal)\n"; my $dR = $R - $Rcal; my $dT = $T - $Tcal; my $S2 = $dR * $dR + $dT * $dT; #print "E=$E: S2=$S2\n"; return $S2; } sub Fit { my ($this) = @_; my $ini = $this->{ini}; my $dini = $this->{dini}; $this->UpdateParameters(); $this->BuildLayerModel(0, 1); my $optimize = $this->{Optimize}; my $Method = $this->{ChooseLSQMethodListBox}->GetText(); my $FitTo = $this->{ChooseFitToListBox}->GetText(); print "Method: $Method\n"; print "Fit to: $FitTo\n"; print "nMaxIter: $ini->{nMaxIter}\n"; my $el = $this->{Ellipsometry}; my $pObsE = $el->GetData('.*eV.*', '.*E.*'); my $pObsR = $el->GetData('R.*'); my $pObsT = $el->GetData('T.*'); #========================================================= # 最適化の実行 #========================================================= $optimize->SetnS2Calculation(0); # $this->{nS2} = 0; my ($OptVars, $MinVal) = $optimize->Optimize( $Method, undef, undef, undef, $ini->{EPS}, $ini->{nMaxIter}, $ini->{iPrintLevel}, sub { $this->CalS2($FitTo, $pObsE, $pObsR, $pObsT, @_); }, undef, sub { Optimize::BuildDifferentialMatrixes(@_); }, ); print "\nOptimized at:\n"; $optimize->PrintParameters(1); $optimize->RecoverParameters($OptVars); $this->SetS2($MinVal); $this->UpdateParameters(); } sub CalS2 { my ($this, $FitTo, $pObsE, $pObsR, $pObsT, $pVars, $iPrintLevel) = @_; #print "pVars=", join(',', @$pVars); my $optimize = $this->{Optimize}; my $ini = $this->{ini}; $optimize->RecoverParameters($pVars); # $this->UpdateParameters(); $this->BuildLayerModel(0, 0); my ($pE, $pR, $pT, $S2) = $this->CalRTArrays($this->{Layers}, $pObsE, $pObsR, $pObsT, $FitTo); $optimize->IncrementnS2(); my $nS2 = $optimize->nS2Calculation(); my $nS2Interval = $ini->{nSaveSpectraInterval}; print "S2[$nS2] = $S2 / "; $S2 += $optimize->CalPenalty(1.0e10, $pVars, 1); print "$S2\n"; $optimize->PrintParameters(1, $pVars, $S2, 0); if($nS2Interval > 0 and $nS2 % $nS2Interval == 0) { $this->Recalc(); # $this->CreateGraphFrame(); $this->AssignGraphData(0); $this->Draw(); } $this->UpdateParameters(); $this->mw()->update(); return $S2; } sub CalRT { my ($this, $E, $Layers) = @_; # my ($Rtots, $Rtotp, $Ttots, $Ttotp) = $Layers->CalEpsRTForSubstrate($E, $this->{ini}->{Angle}); my ($rs123, $rp123, $ts123, $tp123, $Rtots, $Rtotp, $Ttots, $Ttotp) = $Layers->CalFresnelCoefficient($E); return ($Rtots, $Rtotp, $Ttots, $Ttotp); } sub CalRTArrays { my ($this, $Layers, $pObsE, $pObsR, $pObsT, $FitTo) = @_; my $ini = $this->{ini}; my $el = $this->{Ellipsometry}; my $Angle = $ini->{Angle}; $el->SetIncidentAngle($Angle); my $nData = @$pObsE; my (@E, @R, @T); my $S2 = 0.0; my $c = 0; for(my $i = 0 ; $i < $nData ; $i++) { next if($ini->{nSkipData} > 0 and $i % $ini->{nSkipData} != 0); my $E = $pObsE->[$i]; next if($E < $ini->{FitEmin} or $ini->{FitEmax} < $E); my $lwl = $ini->{Rayleighl0} / Optics::eVTonm($E); my $lwl2 = $lwl * $lwl; my $sf = $ini->{Scale} - $lwl2 * $lwl2; # my ($rs, $rp, $ts, $tp, $Rs, $Rp, $Ts, $Tp) = $Layers->CalFresnelCoefficient($E); my ($Rs, $Rp, $Ts, $Tp) = $this->CalRT($E, $this->{Layers}); #print "$E,[$i]: $rs, $rp\n"; my $R = ($Rs + $Rp) / 2.0; my $T = ($Ts + $Tp) / 2.0; $E[$c] = $E; $R[$c] = $R; $T[$c] = $T; if($FitTo eq 'RT' and $pObsR and $pObsT) { my $dT = ($pObsT->[$i] * $sf - $T); my $dR = ($pObsR->[$i] * $sf - $R); $S2 += $dT * $dT + $dR * $dR; } elsif($FitTo eq 'R' and $pObsR) { my $d = ($pObsR->[$i] * $sf - $R); $S2 += $d * $d; } elsif($FitTo eq 'T' and $pObsT) { my $d = ($pObsT->[$i] * $sf - $T); $S2 += $d * $d; } else { print "Error: Invalid Fitting Target [$FitTo].\n"; return; } $c++; } $S2 = sqrt($S2 / $c); return (\@E, \@R, \@T, $S2); } sub ReadSampleDataFile { my ($this, $filepath, $IsPrint) = @_; my $App = $this->App(); #print "type=$type\n"; $this->Initialize(0, 1); $this->{Path} = $filepath; my ($nData, $pLabelArray, @pDataArray) = $this->{Ellipsometry}->Read($filepath); if(!defined $nData) { $App->print("Error: Can not read [$filepath].\n"); return $this->{Path} = undef; } my $nDataArray = $this->{Ellipsometry}->nDataArray(); #print "nDataArray: $nDataArray\n"; $this->{"ChooseXListBox"}->DeleteAllItem(); $this->{"ChooseY1ListBox"}->DeleteAllItem(); $this->{"ChooseY2ListBox"}->DeleteAllItem(); for(my $i = 0 ; $i < $nDataArray ; $i++) { #print "$i: $pLabelArray->[$i]\n"; $this->{"ChooseXListBox"}->AddItem($pLabelArray->[$i]); $this->{"ChooseY1ListBox"}->AddItem($pLabelArray->[$i]); $this->{"ChooseY2ListBox"}->AddItem($pLabelArray->[$i]); } $this->{"ChooseXListBox"}->SetCurSel('.*E.*', '.*eV.*'); $this->{"ChooseY1ListBox"}->SetCurSel('R', 'e1', 'n', 'Psi'); $this->{"ChooseY2ListBox"}->SetCurSel('T', 'e2', 'k', 'Delta'); $this->CreateGraphFrame(); $this->AssignGraphData(); return $filepath; } sub ReadSubstrateDataFile { my ($this, $filepath, $IsPrint) = @_; my $App = $this->App(); #print "type=$type\n"; $this->{Layers} = undef; $this->{Optimize} = undef; $this->{Substrate} = new Ellipsometry; $this->{SubstratePath} = $filepath; my ($nData, $pLabelArray, @pDataArray) = $this->{Substrate}->Read($filepath); if(!defined $nData) { $App->print("Error: Can not read [$filepath].\n"); return $this->{SubstratePath} = undef; } # $this->CreateGraphFrame(); # $this->AssignGraphData(); return $filepath; } sub SaveForSCOUT { my ($this) = @_; my $App = $this->App(); my $optics = new Optics; my $ini = $this->{ini}; my $pE = $this->{Ellipsometry}->GetData('E.*', '.*eV.*'); my $pR = $this->{Ellipsometry}->GetData('R.*'); my $pT = $this->{Ellipsometry}->GetData('T.*'); my $nData = @$pE; my $path = $this->ChooseSaveFile(); return if(!defined $path); my $out = new JFile; if(!$out->Open($path, "w")) { $App->print("Error: Can not write to [$path].\n"); return undef; } $out->print("E(eV),wl(nm),R,T\n"); for(my $i = 0 ; $i < $nData ; $i++) { my $E = $pE->[$i]; my $wl = Optics::eVTonm($E); my $R = $pR->[$i]; my $T = $pT->[$i]; $out->print("$E,$wl,$R,$T\n"); } $out->Close(); $path = "$path.txt"; $App->print("Parameters are stored in [$path].\n"); $out = new JFile; if(!$out->Open($path, "w")) { $App->print("Error: Can not write to [$path].\n"); return undef; } $out->print("[Background]\n"); $out->print("e1 : $ini->{e1inf}\n"); $out->print("e2 : $ini->{e2inf}\n"); $out->print("\n"); $out->print("[Tauc-Lorentz]\n"); $out->print("A : $ini->{A}\n"); $out->print("C : $ini->{C}\n"); my $EgK = Optics::eVToKiser($ini->{Eg}); $out->printf("Eg : %12.6g eV %12.6g cm-1\n", $ini->{Eg}, $EgK); $EgK = Optics::eVToKiser($ini->{En0}); $out->printf("En0: %12.6g eV %512.6g cm-1\n", $ini->{En0}, $EgK); $out->print("\n"); for(my $i = 1 ; ; $i++) { last if(!defined $ini->{"Ne$i"}); $out->print("[Lorentz$i]\n"); $EgK = Optics::eVToKiser($ini->{"E0$i"}); $out->printf("E0 : %12.6g %12.6g cm-1\n", $ini->{"E0$i"}, $EgK); $EgK = Optics::eVToKiser($ini->{"G$i"}); $out->printf("G : %12.6g eV %12.6g cm-1\n", $ini->{"G$i"}, $EgK); my $A = $optics->CalLorentzAfromNe($ini->{"Ne$i"}, 1.0); $out->printf("Ne : %12.6g cm-3 A=%12.6g\n", $ini->{"Ne$i"}, $A); $out->print("\n"); } for(my $i = 1 ; ; $i++) { last if(!defined $ini->{"DrudeEp$i"}); $out->print("[Drude$i]\n"); $EgK = Optics::eVToKiser($ini->{"DrudeEp$i"}); $out->printf("Ep : %12.6g %12.6g cm-1\n", $ini->{"DrudeEp$i"}, $EgK); my $EgeV = Optics::HzToeV(1.0 / $ini->{"Drudetau$i"}); $EgK = Optics::eVToKiser($EgeV); $out->printf("tau: %12.6g s %12.6g cm-1 %12.6g eV\n", $ini->{"Drudetau$i"}, $EgK, $EgeV); $out->print("\n"); } $out->Close(); } sub CreateGraphFrame { my ($this, $canvas, $TargetData) = @_; $canvas = $this->Canvas(); my $App = $this->App(); my $font = $App->{'GraphFrameFont'}; my @font = split(/,/, $font) if($font); my $w = $canvas->width(); my $h = $canvas->height(); # my $FileType = $this->FileType(); # return undef unless($FileType); # my $pDataArray = $this->DataArray(); # return unless($pDataArray); my $GraphFrameArray = $this->{'GraphFrameArray'} = new GraphFrameArray($this->mw()); $GraphFrameArray->SetCanvasSize($w, $h); $GraphFrameArray->AddGraphFrame(); my $GraphFrame0 = $GraphFrameArray->GetGraphFrame(0); my $FramePosStr0 = $App->{"GraphFrame0Position"}; $GraphFrame0->SetXCaption(""); my $XScale0 = $GraphFrame0->GetXScale(0); my $YScale0 = $GraphFrame0->GetYScale(0); $GraphFrame0->SetPositionByStr($FramePosStr0); $XScale0->SetScaleStringVisible(0); $XScale0->SetCaptionVisible(1); $GraphFrameArray->AddGraphFrame(); my $GraphFrame1 = $GraphFrameArray->GetGraphFrame(1); $GraphFrame1->SetYCaption(""); my $FramePosStr1 = $App->{"GraphFrame1Position"}; my $XScale1 = $GraphFrame1->GetXScale(0); my $YScale1 = $GraphFrame1->GetYScale(0); $GraphFrame1->SetPositionByStr($FramePosStr1); $XScale1->SetScaleStringVisible(1); $XScale1->SetCaptionVisible(1); $GraphFrame0->SetViewRange(0, 0, 1, 1); $GraphFrame1->SetViewRange(0, 0, 1, 1); } sub ShowScaleDialog { my ($this, $GraphFrame, $command, $Title, @a) = @_; #$command: "XScale" "YScale" #最初の4つのundefはViewRangeに現在値を使う #次の2つのundefはPlotTypeに現在値を使う設定 #そのあとの1,0は、X,Y軸のPlotTypeの同期をおこなうかどうか #最後の1は、ScaleDialogでOKを押されたらグラフの再描画を行う #  Y軸のViewRangeは同期するが、PlotTypeの同期は無視する return $GraphFrame->ShowScaleDialog($Title, undef, undef, undef, undef, undef, undef, 1, 0, 1); } sub AdjustViewRange($$) { my ($this) = @_; my $GraphFrameArray = $this->GetGraphFrameArray(); my $GraphFrame0 = $GraphFrameArray->GetGraphFrame(0); $GraphFrame0->SetViewRange($GraphFrame0->GetViewRange(), 1) if($GraphFrame0); } sub AssignGraphData { my ($this, $ResetViewRange) = @_; $ResetViewRange = 1 if(!defined $ResetViewRange); my $GraphFrameArray = $this->GetGraphFrameArray(); my $GraphFrame0 = $GraphFrameArray->GetGraphFrame(0); my $GraphFrame1 = $GraphFrameArray->GetGraphFrame(1); $GraphFrame0->ClearAllData(); $GraphFrame1->ClearAllData(); my $XLabel = $this->{"ChooseXListBox"}->GetText(); $XLabel = 'X' if(!$XLabel); my $Y1Label = $this->{"ChooseY1ListBox"}->GetText(); $Y1Label = 'Y1' if(!$Y1Label); my $Y2Label = $this->{"ChooseY2ListBox"}->GetText(); $Y2Label = 'Y2' if(!$Y2Label); $GraphFrame0->SetXCaption($XLabel); my $pX = $this->{Ellipsometry}->GetData($XLabel, '.*E.*', '.*eV.*'); my $pY1 = $this->{Ellipsometry}->GetData($Y1Label); my $pY2 = $this->{Ellipsometry}->GetData($Y2Label); my $nData = $this->{Ellipsometry}->nData(); my $YLabel = ''; $YLabel .= $Y1Label if($pY1); $YLabel .= ",$Y2Label" if($pY2); $GraphFrame0->SetXCaption(""); $GraphFrame0->SetYCaption("$Y1Label,$Y2Label"); if($pX) { my $ini = $this->{ini}; my (@y1, @y2); for(my $i = 0 ; $i < @$pX ; $i++) { my $E = $pX->[$i]; my $lwl = $ini->{Rayleighl0} / Optics::eVTonm($E); my $lwl2 = $lwl * $lwl; my $sf = $ini->{Scale} - $lwl2 * $lwl2; if($pY1) { $y1[$i] = $pY1->[$i] * $sf; } if($pY2) { $y2[$i] = $pY2->[$i] * $sf; } } $GraphFrame0->AddGraphData($pX, \@y1, 2, "black", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y1Label}(obs)") if($pY1); $GraphFrame0->AddGraphData($pX, \@y2, 2, "red", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y2Label}(obs)") if($pY2); } if($pX and $pY1 and $pY2) { my @alpha; my $d = $this->{ini}->{FilmThickness} * 1.0e-7; # cm for(my $i = 0 ; $i < @$pX ; $i++) { my $R = $pY1->[$i]; my $T = $pY2->[$i]; my $Tc = $T / (1.0 - $R); $Tc = 1.0 if($Tc <= 0.0); $alpha[$i] = -log($Tc) / $d; } $GraphFrame1->AddGraphData($pX, \@alpha, 2, "black", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "alpha(obs)"); } my $pCalE = $this->{pEArray}; my $pCalR = $this->{pRArray}; my $pCalT = $this->{pTArray}; if($pCalE) { $GraphFrame0->AddGraphData($pCalE, $pCalR, 0, "black", "circle", 3, "", 1, "black", "XAutoSkip", "Energy", "${Y1Label}(cal)") if($pCalR and $pY1); # 1, "black", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y1Label}(cal)") if($pCalR and $pY1); $GraphFrame0->AddGraphData($pCalE, $pCalT, 0, "red", "circle", 3, "", 1, "red", "XAutoSkip", "Energy", "${Y2Label}(cal)") if($pCalT and $pY2); # 1, "red", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y2Label}(cal)") if($pCalT and $pY2); my @alpha; my $d = $this->{ini}->{FilmThickness} * 1.0e-7; # cm for(my $i = 0 ; $i < @$pCalR ; $i++) { my $R = $pCalR->[$i]; my $T = $pCalT->[$i]; my $Tc = $T / (1.0 - $R); $Tc = 1.0 if($Tc <= 0.0); #print "R=$R,$T,$Tc\n"; $alpha[$i] = -log($Tc) / $d; } $GraphFrame1->AddGraphData($pCalE, \@alpha, 0, "black", "circle", 3, "", 1, "black", "XAutoSkip", "Energy", "alpha(obs)"); } if($this->{PbPE}) { $GraphFrame0->AddGraphData($this->{PbPE}, $this->{PbPR}, 0, "", "square", 3, "", 1, "black", "XAutoSkip", "Energy", "${Y1Label}(PbP)"); # 1, "black", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y1Label}(PbP)"); $GraphFrame0->AddGraphData($this->{PbPE}, $this->{PbPT}, 0, "", "square", 3, "", 1, "red", "XAutoSkip", "Energy", "${Y2Label}(PbP)"); # 1, "red", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y2Label}(PbP)"); my @alpha; my $d = $this->{ini}->{FilmThickness} * 1.0e-7; # cm for(my $i = 0 ; $i < @$pCalR ; $i++) { my $R = $this->{PbPR}->[$i]; my $T = $this->{PbPR}->[$i]; my $Tc = $T / (1.0 - $R); $Tc = 1.0 if($Tc <= 0.0); #print "R=$R,$T,$Tc\n"; $alpha[$i] = -log($Tc) / $d; } $GraphFrame1->AddGraphData($this->{PbPE}, \@alpha, 0, "black", "square", 3, "", 1, "black", "XAutoSkip", "Energy", "alpha(PbP)"); } $GraphFrame0->SetYScalePlotType('x'); $GraphFrame1->SetYScalePlotType('x'); $GraphFrame1->SetXCaption("Energy / eV"); $GraphFrame1->SetYCaption(""); if($GraphFrame1) { $GraphFrame0->AddSynchronousFrame('x', $GraphFrame1); $GraphFrame1->AddSynchronousFrame('x', $GraphFrame0); } if($ResetViewRange) { $GraphFrame0->CalMinMax(); $GraphFrame1->CalMinMax(); $GraphFrame0->AdjustViewRange(0.05, 0.05, 0.05, 0.05); $GraphFrame1->AdjustViewRange(0.05, 0.05, 0.05, 0.05); $GraphFrame0->SetViewRange($GraphFrame0->GetViewRange(), 1); } } 1;