#=============================================== # TkEllipsometryFCA #=============================================== package TkEllipsometryFCA; use clib::TkEllipsometry; @ISA = qw(TkEllipsometry); #公開したいサブルーチン #@EXPORT = qw(DelSpace Reduce01 MakePath RegExpQuote); use strict; my $pi = Sci::pi(); my $kB = Sci::kB(); my $c = Sci::c(); my $e = Sci::e(); my $e0 = Sci::e0(); my $me = Sci::me(); my $mp = Sci::mp(); my $mn = Sci::mn(); my $h = Sci::h(); my $hbar = Sci::hbar(); my $torad = Sci::torad(); my $todeg = Sci::todeg(); #============================================================ # 変数等取得関数 #============================================================ #============================================================ # コンストラクタ、デストラクタ #============================================================ #============================================================ # 継承クラスで定義しなおす関数 #============================================================ sub CreateWidgets { my ($this) = @_; my $App = $this->App(); my $args = $App->Args(); my $mw = $this->mw(); $this->{ini} = new IniFile(undef, 0, 0); $this->{dini} = new IniFile(undef, 0, 0); $this->{Ellipsometry} = new Ellipsometry; $this->SUPER::CreateWidgets(1); $mw->SetTitle("Ellipsometry for FCA 2007 / TkPlot"); $this->App()->SetProgram("Ellipsometry for FCA 2007 / TkPlot"); $this->{nLorentz} = 2 if(!defined $this->{nLorentz}); $this->{nDrude} = 1 if(!defined $this->{nDrude}); #=================================================== # ペインを作製 #=================================================== my $EntryWidth = 12; my $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); $this->MakeChooseFileEntry($Frame, 'Param', 'Param:', $this->{ini}->pVariable("ParameterFile", ""), '&Choose', sub { $this->ChooseFile(@_); }, "ChooseParameterFile"); $this->{SaveParamButton} = $Frame->MyButton( -text => '&Save', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'SaveParam'); }, )->pack(-side => 'left'); $this->{EditParamButton} = $Frame->MyButton( -text => 'ed', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'EditParam'); }, )->pack(-side => 'left'); $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); $this->MakeChooseFileEntry($Frame, 'SampleCSV', 'Sample:', $this->{ini}->pVariable("SampleCSVFile", ""), '&Choose', sub { $this->ChooseFile(@_); }, "ChooseSampleFile"); $this->{EditDataButton} = $Frame->MyButton( -text => 'ed', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'EditSampleCSV'); }, )->pack(-side => 'left'); $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); $this->MakeChooseFileEntry($Frame, 'SubstrateCSV', 'Substrate:', $this->{ini}->pVariable("SubstrateCSVFile", ""), '&Choose', sub { $this->ChooseFile(@_); }, "ChooseSubstrateFile"); $this->{EditDataButton} = $Frame->MyButton( -text => 'ed', -takefocus => 1, -command => [\&ButtonPressed, $this, 'RButtonDown', 'EditSubstrateCSV'], )->pack(-side => 'left'); $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); my $lsb1 = $this->{ChooseXListBox} = $Frame->MyBrowseEntry( -label => "X:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => [], -SelIndex => 0, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $lsb1->configure(-browsecmd => [ \&SelChangeListBox, $this, "X", $this->{ChooseXListBox} ] ); my $lsb2 = $this->{ChooseY1ListBox} = $Frame->MyBrowseEntry( -label => "Y1:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => [], -SelIndex => 1, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $lsb2->configure(-browsecmd => [ \&SelChangeListBox, $this, "Y1", $this->{ChooseY1ListBox} ]); my $lsb3 = $this->{ChooseY2ListBox} = $Frame->MyBrowseEntry( -label => "Y2:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => [], -SelIndex => 2, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $lsb3->configure(-browsecmd => [ \&SelChangeListBox, $this, "Y2", $this->{ChooseY2ListBox} ]); $Frame = $mw->MyLabFrame( -label => 'Fitting1', -labelside => 'acrosstop', )->pack(-anchor => 'nw', -fill => 'x'); my $lsb4 = $this->{ChooseLSQMethodListBox} = $Frame->MyBrowseEntry( -label => "LSQ Method:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => ['Amoeba::Simplex', 'PDL::Simplex', 'ModifiedNewton'], -SelIndex => 0, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $lsb4->configure(-browsecmd => [\&SelChangeListBox, $this, "LSQMethod", $this->{ChooseLSQMethodListBox}]); my $lsb5 = $this->{ChooseFitToListBox} = $Frame->MyBrowseEntry( -label => "Fit to:", -state => "readonly", -takefocus => 1, -width => 5, -Selections => ['Eps', 'PsiDelta', 'IsIcII', 'IsIcIII'], -SelIndex => 0, )->pack(-side => 'left', -expand => 'yes', -fill => 'x'); $Frame = $mw->MyLabFrame( -label => 'Fitting2', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeLabelEntry($Frame, "FitEmin", "Emin:", $this->{ini}->pVariable('FitEmin', ''), "%s", $EntryWidth, "eV", 0, 0); $this->MakeLabelEntry($Frame, "FitEmax", "Emax:", $this->{ini}->pVariable('FitEmax', ''), "%s", $EntryWidth, "eV", 0, 1); $this->MakeLabelEntry($Frame, "nSkipData", "nSkip:", $this->{ini}->pVariable('nSkipData', 2), "%d", $EntryWidth, "", 0, 2); $this->MakeLabelEntry($Frame, "EPS", "EPS:", $this->{ini}->pVariable('EPS', 1.0e-5), "%12.4g", $EntryWidth, "", 1, 0); $this->MakeLabelEntry($Frame, "nMaxIter", "MaxIter:", $this->{ini}->pVariable('nMaxIter', 1000), "%d", $EntryWidth, "", 1, 1); $this->MakeLabelEntry($Frame, "nSaveSpectraInterval", "SaveIntvl:", $this->{ini}->pVariable('nSaveSpectraInterval', 10), "%d", $EntryWidth, "", 1, 2); $Frame = $mw->MyLabFrame( -label => 'Ellipsometry', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeLabelEntry($Frame, "Angle", "Angle:", $this->{ini}->pVariable('Angle', 70.0), "%8.4f", $EntryWidth, "deg", 0, 0); $Frame = $mw->MyLabFrame( -label => 'Film', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeCheckEntry($Frame, "FilmThickness", "Thickness:", $this->{dini}->pVariable('FilmThicknesscheck', 1), $this->{ini}->pVariable('FilmThickness', 100.0), "%12.6g", $EntryWidth, "nm", 0, 0); my $lsb6 = $this->{ChooseLayerModelBox} = $Frame->MyBrowseEntry( -label => "Layer Model:", -state => "readonly", -takefocus => 1, -width => 10, -Selections => ["Film/Substrate"], -SelIndex => 0, )->grid(-row => 0, -column => 3, -columnspan => 1, -sticky => 'e' ); $lsb6->configure(-browsecmd => [\&SelChangeListBox, $this, "LayerModel", $this->{ChooseLayerModelListBox}]); $Frame = $mw->MyLabFrame( -label => 'Dielectric background', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeCheckEntry($Frame, "e1inf", "e1:", $this->{dini}->pVariable('e1infcheck', 1) , $this->{ini}->pVariable('e1inf', 0.155), "%12.6g", $EntryWidth, "e0", 0, 0); $this->MakeCheckEntry($Frame, "e2inf", "e2:", $this->{dini}->pVariable('e2infcheck', 0) , $this->{ini}->pVariable('e2inf', 0.0 ), "%12.6g", $EntryWidth, "e0", 0, 1); $Frame = $mw->MyLabFrame( -label => 'Tauc-Lorentz', -labelside => 'acrosstop', )->pack(-anchor => 'nw'); $this->MakeCheckEntry($Frame, "A", "A:", $this->{dini}->pVariable('Acheck', 1) , $this->{ini}->pVariable('A', 122.8), "%12.6g", $EntryWidth, "", 0, 0); $this->MakeCheckEntry($Frame, "C", "C:", $this->{dini}->pVariable('Ccheck', 1) , $this->{ini}->pVariable('C', 10.8), "%12.6g", $EntryWidth, "", 0, 1); $this->MakeCheckEntry($Frame, "Eg", "Eg:", $this->{dini}->pVariable('Egcheck', 1) , $this->{ini}->pVariable('Eg', 4.4), "%12.6g", $EntryWidth, "eV", 1, 0); $this->MakeCheckEntry($Frame, "En0", "En0:", $this->{dini}->pVariable('En0check', 1) , $this->{ini}->pVariable('En0', 155.9), "%12.6g", $EntryWidth, "eV", 1, 1); $Frame = $mw->MyLabFrame( -label => "Lorentz", -labelside => 'acrosstop', )->pack(-anchor => 'nw'); for(my $i = 0 ; $i < $this->{nLorentz} ; $i++) { my $i1 = $i + 1; $this->MakeCheckEntry($Frame, "E0${i1}", "E0:", $this->{dini}->pVariable("E0${i1}check", 1) , $this->{ini}->pVariable("E0${i1}", 2.64), "%12.6g", $EntryWidth, "eV", $i, 0); $this->MakeCheckEntry($Frame, "Ne${i1}", "Ne:", $this->{dini}->pVariable("Ne${i1}check", 1) , $this->{ini}->pVariable("Ne${i1}", 2e26), "%12.6g", $EntryWidth, "m-3", $i, 1); $this->MakeCheckEntry($Frame, "G${i1}", "G:", $this->{dini}->pVariable("G${i1}check", 1) , $this->{ini}->pVariable("G${i1}", 2.64), "%12.6g", $EntryWidth, "eV", $i, 2); } $Frame = $mw->MyLabFrame( -label => "Drude", -labelside => 'acrosstop', )->pack(-anchor => 'nw'); for(my $i = 0 ; $i < $this->{nDrude} ; $i++) { my $i1 = $i + 1; $this->MakeCheckEntry($Frame, "DrudeEp${i1}", "Ep:", $this->{dini}->pVariable("DrudeEp${i1}check", 1) , $this->{ini}->pVariable("DrudeEp${i1}", 0.0), "%12.6g", $EntryWidth, "eV", $i, 1); $this->MakeCheckEntry($Frame, "Drudetau${i1}", "tau:", $this->{dini}->pVariable("Drudetau${i1}check", 1) , $this->{ini}->pVariable("Drudetau${i1}", 1.0e-14), "%12.6g", $EntryWidth, "s", $i, 2); } $this->UpdateParameters(); $Frame = $mw->MyFrame()->pack(-anchor => 'nw', -fill => 'x'); $this->{RecalcButton} = $Frame->MyButton( -text => 'Re&calc', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'Recalc'); }, )->pack(-side => 'left'); $this->{FitButton} = $Frame->MyButton( -text => '&Fit', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'Fit'); }, )->pack(-side => 'left'); $this->{SaveForSCOUTButton} = $Frame->MyButton( -text => 'Save for &SCOUT', -takefocus => 1, -command => sub { $this->ButtonPressed('RButtonDown', 'SaveForSCOUT'); }, )->pack(-side => 'left'); #ツールバーのOpenボタンをファイル読み込みにバインドする $mw->{OpenButton}->configure( -command => sub { $this->ChooseFile('SampleCSVFile', $this->{SPEFileFileEntry}); }, ) if($mw->{OpenButton}); } sub SelChangeListBox { my ($this, $type, $lb) = @_; #print "this:$this lb=$lb\n"; my $s = $lb->GetText(); $this->AssignGraphData(); $this->Draw(); } sub ChooseFile { my ($this, $type, $widget, $Option) = @_; my $App = $this->App(); my $canvas = $this->Canvas(); my $mw = $this->mw(); #print "Opt=$Option\n"; my $mode = 'open'; my $fmask = '*.csv;*.spe;*.jel;*.asp;*.smo;*isa;*.ref;*.pal;*.bef;*.aft'; if($Option eq 'ChooseParameterFile') { # $mode = 'save'; $fmask = '*.prm'; } my $dir = ''; unless($widget) { $dir = $this->App()->{WorkDir}; chdir($dir); } my $defstr = ''; my $message = 'Choose file'; my $filepath = Dialog::OpenFileDialog($mw, 'open', $fmask, $defstr, $message, $dir); if($filepath) { my $DirPath = $this->SetWorkDir($filepath); if($widget) { $widget->SetText($filepath); } } else { return undef; } my $ret; if($Option eq 'ChooseParameterFile') { $ret = $this->ReadParameterFile($filepath); return undef unless($ret); $this->Draw(); } elsif($Option eq 'ChooseSampleFile') { $ret = $this->ReadSampleDataFile($filepath); return undef unless($ret); $this->Draw(); } return $ret; } sub ButtonPressed { my ($this, $event, $type) = @_; my $App = $this->App(); if($type eq 'Recalc') { $this->Recalc(); $this->CreateGraphFrame(); $this->AssignGraphData(1); $this->Draw(); } elsif($type eq 'SaveForSCOUT') { $this->SaveForSCOUT(); } elsif($type eq 'Fit') { &Fit($this); $this->Recalc(); # $this->CreateGraphFrame(); $this->AssignGraphData(0); $this->Draw(); return; } elsif($type eq 'SaveParam') { $this->SaveParameterFile($this->{ini}->{ParameterFile}); return; } elsif($type eq 'EditParam') { my $Editor = $this->App()->{EditorPath}; my $File = $this->{ini}->{ParameterFile}; my $command = "$Editor $File"; system($command); return; } elsif($type eq 'EditSampleCSV') { my $Editor = $this->App()->{EditorPath}; my $File = $this->{ini}->{SampleCSVFile}; my $command = "$Editor $File"; system($command); return; } elsif($type eq 'EditSubstrateCSV') { my $Editor = $this->App()->{EditorPath}; my $File = $this->{ini}->{SubstrateCSVFile}; my $command = "$Editor $File"; system($command); return; } } sub EntryFocusedIn { my ($this, $obj, $event, $type) = @_; #print "In: obj=$obj, this=$this, event=$event, type=$type\n"; if($event eq 'FocusIn') { $obj->{PrevValue} = $obj->GetText(); } } sub EntryFocusedOut { my ($this, $obj, $event, $type) = @_; #print "Out: obj=$obj, this=$this, event=$event, type=$type\n"; my $ini = $this->{ini}; my $dini = $this->{dini}; if($event eq 'FocusOut') { } if($ini->{AutoUpdate} and defined $dini->{"${type}check"} and $obj->{PrevValue} != $obj->GetText()) { $this->Recalc(); # $this->CreateGraphFrame(); $this->AssignGraphData(0); $this->Draw(); } else { $this->UpdateParameters(); } } #=================================================== # データ処理 #=================================================== sub BuildLayerModel { my ($this, $IsPrint, $BuildOptimize) = @_; $IsPrint = 1 if(!defined $IsPrint); $BuildOptimize = 1 if(!defined $BuildOptimize); my $ini = $this->{ini}; my $dini = $this->{dini}; my $el = $this->{Ellipsometry}; my $optics = new Optics; my $Layers = new MultiLayer; $Layers->SetIncidentAngle($ini->{Angle}); my $pObsE = $el->GetData('.*eV.*', '.*E.*'); my $pObsPsi = $el->GetData('Psi'); my $pObsDelta = $el->GetData('Delta'); my $pObsEps1 = $el->GetData('e1'); my $pObsEps2 = $el->GetData('e2'); my $nData = @$pObsE; my $nE = $nData; $ini->{FitEmin} = $pObsE->[0] if($ini->{FitEmin} eq ''); $ini->{FitEmax} = $pObsE->[$nData-1] if($ini->{FitEmax} eq ''); my $Emin = $ini->{FitEmin}; my $Emax = $ini->{FitEmax}; my $Estep = $pObsE->[1] - $pObsE->[0]; $Estep = 0.05 if(!defined $Estep); $nData = int( ($Emax - $Emin) / $Estep + 1.001); my $Air = new OpticalMaterial("air"); my $Film = new OpticalMaterial("Specify", "Film"); my $Substrate = new OpticalMaterial("Specify", "Substrate"); if($ini->{SubstrateCSVFile}) { my @ret = $Substrate->AddDielectricModel( "Substrate", "EFile", "Path", $ini->{SubstrateCSVFile}, ); if(@ret == 0) { print "Error: Can not read [$ini->{SubstrateCSVFile}].\n"; return; } } $Film->AddDielectricModel( "Constant1", "Constant", "e1inf", $ini->{e1inf}, "e2inf", $ini->{e2inf}, ); $Film->AddDielectricModel( "TaucLorentz1", "TaucLorentz", "A", $ini->{A}, "Eg", $ini->{Eg}, "En0", $ini->{En0}, "C", $ini->{C} ); for(my $i = 0 ; $i < $this->{nLorentz} ; $i++) { my $i1 = $i + 1; $Film->AddDielectricModel( "Lorentz$i1", "Lorentz", "Ne", $ini->{"Ne$i1"}, "E0", $ini->{"E0$i1"}, "G", $ini->{"G$i1"}, ); } for(my $i = 0 ; $i < $this->{nDrude} ; $i++) { my $i1 = $i + 1; $Film->AddDielectricModel( "Drude$i1", "Drude", "Ep", $ini->{"DrudeEp$i1"}, "tau", $ini->{"Drudetau$i1"}, ); } $Layers->AddLayer($Air, -1.0, 0.0); $Layers->AddLayer($Film, $ini->{FilmThickness}*1.0e-9, 1.0); $Layers->AddLayer($Substrate, -1.0, 0.0); $this->{Layers} = $Layers; $Layers->PrintLayers() if($IsPrint); #========================================================= # フィッティング設定 #========================================================= return if(!$BuildOptimize); my $optimize = new Optimize(); $optimize->AddParameters( "FilmThickness", $Layers->pLayerThickness(1), $dini->{FilmThicknesscheck}, $dini->{FilmThicknessscale}, $dini->{FilmThicknessmin}, $dini->{FilmThicknessmax}, sub { $Layers->SetLayerThickness(1, $_[0]); $ini->{FilmThickness} = $_[0]*1.0e9; }, "e1", $Layers->pVariable(1, 'Constant1::e1inf'), $dini->{e1infcheck}, $dini->{e1infscale}, $dini->{e1infmin}, $dini->{e1infmax}, sub { $Layers->SetVariable(1, 'Constant1::e1inf', $_[0]); $ini->{e1inf} = $_[0]; }, "e2", $Layers->pVariable(1, 'Constant1::e2inf'), $dini->{e2infcheck}, $dini->{e2infscale}, $dini->{e2infmin}, $dini->{e2infmax}, sub { $Layers->SetVariable(1, 'Constant1::e2inf', $_[0]); $ini->{e2inf} = $_[0]; }, "TLA", $Layers->pVariable(1, 'TaucLorentz1::A'), $dini->{Acheck}, $dini->{Ascale}, $dini->{Amin}, $dini->{Amax}, sub { $Layers->SetVariable(1, 'TaucLorentz1::A', $_[0]); $ini->{A} = $_[0]; }, "TLC", $Layers->pVariable(1, 'TaucLorentz1::C'), $dini->{Ccheck}, $dini->{Cscale}, $dini->{Cmin}, $dini->{Cmax}, sub { $Layers->SetVariable(1, 'TaucLorentz1::C', $_[0]); $ini->{C} = $_[0]; }, "TLEg", $Layers->pVariable(1, 'TaucLorentz1::Eg'), $dini->{Egcheck}, $dini->{Egscale}, $dini->{Egmin}, $dini->{Egmax}, sub { $Layers->SetVariable(1, 'TaucLorentz1::Eg', $_[0]); $ini->{Eg} = $_[0]; }, "TLEn0", $Layers->pVariable(1, 'TaucLorentz1::En0'), $dini->{En0check}, $dini->{En0scale}, $dini->{En0min}, $dini->{En0max}, sub { $Layers->SetVariable(1, 'TaucLorentz1::En0', $_[0]); $ini->{En0} = $_[0]; }, ); for(my $i = 0 ; $i < $this->{nLorentz} ; $i++) { my $i1 = $i + 1; $optimize->AddParameters( "L${i1}E0", $Layers->pVariable(1, "Lorentz${i1}::E0"), $dini->{"E0${i1}check"}, $dini->{"E0${i1}scale"}, $dini->{"E0${i1}min"}, $dini->{"E0${i1}max"}, sub { $Layers->SetVariable(1, "Lorentz${i1}::E0", $_[0]); $ini->{"E0${i1}"} = $_[0]; }, "L${i1}Ne", $Layers->pVariable(1, "Lorentz${i1}::Ne"), $dini->{"Ne${i1}check"}, $dini->{"Ne${i1}scale"}, $dini->{"Ne${i1}min"}, $dini->{"Ne${i1}max"}, sub { $Layers->SetVariable(1, "Lorentz${i1}::Ne", $_[0]); $ini->{"Ne${i1}"} = $_[0]; $ini->{"A${i1}"} = $optics->CalLorentzAfromNe($ini->{"Ne${i1}"}, 1.0); }, "L${i1}G", $Layers->pVariable(1, "Lorentz${i1}::G"), $dini->{"G${i1}check"}, $dini->{"G${i1}scale"}, $dini->{"G${i1}min"}, $dini->{"G${i1}max"}, sub { $Layers->SetVariable(1, "Lorentz${i1}::G", $_[0]); $ini->{"G${i1}"} = $_[0]; }, ); } for(my $i = 0 ; $i < $this->{nDrude} ; $i++) { my $i1 = $i + 1; $optimize->AddParameters( "D${i1}Ep", $Layers->pVariable(1, "Drude${i1}::Ep"), $dini->{"DrudeEp${i1}check"}, $dini->{"DrudeEp${i1}scale"}, $dini->{"DrudeEp${i1}min"}, $dini->{"DrudeEp${i1}max"}, sub { $Layers->SetVariable(1, "Drude${i1}::Ep", $_[0]); $ini->{"DrudeEp${i1}"} = $_[0]; }, "D${i1}tau", $Layers->pVariable(1, "Drude${i1}::tau"), $dini->{"Drudetau${i1}check"}, $dini->{"Drudetau${i1}scale"}, $dini->{"Drudetau${i1}min"}, $dini->{"Drudetau${i1}max"}, sub { $Layers->SetVariable(1, "Drude${i1}::tau", $_[0]); $ini->{"Drudetau${i1}"} = $_[0]; }, ); } $this->{Optimize} = $optimize; } sub Recalc { my ($this) = @_; $this->UpdateParameters(); $this->BuildLayerModel(1, 0); my $el = $this->{Ellipsometry}; my $Layers = $this->{Layers}; my $pObsE = $el->GetData('.*eV.*', '.*E.*'); my $pObsPsi = $el->GetData('Psi'); my $pObsDelta = $el->GetData('Delta'); my $pObsEps1 = $el->GetData('e1'); my $pObsEps2 = $el->GetData('e2'); my $FitTo = $this->{ChooseFitToListBox}->GetText(); my ($pE, $pe1, $pe2, $pPsi, $pDelta, $pIs, $pIc, $S2) = $this->CalEpsPsiDelta($Layers, $pObsE, $pObsPsi, $pObsDelta, $pObsEps1, $pObsEps2, $FitTo); $this->{pEArray} = $pE; $this->{pe1Array} = $pe1; $this->{pe2Array} = $pe2; $this->{pPsiArray} = $pPsi; $this->{pDeltaArray} = $pDelta; $this->{pIsArray} = $pIs; $this->{pIcArray} = $pIc; $this->App()->print("Recalc: S2=$S2\n"); $this->SetS2($S2); return $S2; } sub Fit { my ($this) = @_; my $ini = $this->{ini}; my $dini = $this->{dini}; $this->UpdateParameters(); $this->BuildLayerModel(0, 1); my $optimize = $this->{Optimize}; my $Method = $this->{ChooseLSQMethodListBox}->GetText(); my $FitTo = $this->{ChooseFitToListBox}->GetText(); print "Method: $Method\n"; print "Fit to: $FitTo\n"; print "nMaxIter: $ini->{nMaxIter}\n"; my $el = $this->{Ellipsometry}; my $pObsE = $el->GetData('.*eV.*', '.*E.*'); my $pObsPsi = $el->GetData('Psi'); my $pObsDelta = $el->GetData('Delta'); my $pObsEps1 = $el->GetData('e1'); my $pObsEps2 = $el->GetData('e2'); $optimize->SetnS2Calculation(0); # $this->{nS2} = 0; my ($OptVars, $MinVal) = $optimize->Optimize( $Method, undef, undef, undef, $ini->{EPS}, $ini->{nMaxIter}, $ini->{iPrintLevel}, sub { $this->CalS2($FitTo, $pObsE, $pObsPsi, $pObsDelta, $pObsEps1, $pObsEps2, @_); }, undef, sub { Optimize::BuildDifferentialMatrixes(@_); }, ); print "\nOptimized at:\n"; $optimize->PrintParameters(1); $optimize->RecoverParameters($OptVars); $this->SetS2($MinVal); $this->UpdateParameters(); } sub CalS2 { my ($this, $FitTo, $pObsE, $pObsPsi, $pObsDelta, $pObsEps1, $pObsEps2, $pVars, $iPrintLevel) = @_; #print "pVars=", join(',', @$pVars); my $optimize = $this->{Optimize}; my $ini = $this->{ini}; $optimize->RecoverParameters($pVars); # $this->UpdateParameters(); $this->BuildLayerModel(0, 0); my ($pE, $pe1, $pe2, $pPsi, $pDelta, $pIs, $pIc, $S2) = $this->CalEpsPsiDelta($this->{Layers}, $pObsE, $pObsPsi, $pObsDelta, $pObsEps1, $pObsEps2, $FitTo); $optimize->IncrementnS2(); my $nS2 = $optimize->nS2Calculation(); my $nS2Interval = $ini->{nSaveSpectraInterval}; print "S2[$nS2] = $S2 / "; $S2 += $optimize->CalPenalty(1.0e10, $pVars, 1); print "$S2\n"; $optimize->PrintParameters(1, $pVars, $S2); if($nS2Interval > 0 and $nS2 % $nS2Interval == 0) { $this->Recalc(); # $this->CreateGraphFrame(); $this->AssignGraphData(0); $this->Draw(); } $this->mw()->update(); return $S2; } sub CalEpsPsiDelta { my ($this, $Layers, $pObsE, $pObsPsi, $pObsDelta, $pObsEps1, $pObsEps2, $FitTo) = @_; my $ini = $this->{ini}; my $el = $this->{Ellipsometry}; my $Angle = $ini->{Angle}; my $nData = @$pObsE; my (@E, @e1, @e2, @Psi, @Delta, @Is, @Ic); my $S2 = 0.0; my $c = 0; for(my $i = 0 ; $i < $nData ; $i++) { next if($ini->{nSkipData} > 0 and $i % $ini->{nSkipData} != 0); my $E = $pObsE->[$i]; next if($E < $ini->{FitEmin} or $ini->{FitEmax} < $E); my ($Psi, $Delta) = $Layers->CalPsiDelta($E); my ($e1c, $e2c) = $el->PsiDeltaToEps($Psi, $Delta, $Angle); $E[$c] = $E; $e1[$c] = $e1c; $e2[$c] = $e2c; $Psi[$c] = $Psi; $Delta[$c] = $Delta; #print "E=$E, e=($e1c,$e2c), Psi=($Psi,$Delta)\n"; if(!defined $pObsPsi) { $c++; next; } #my $pIs = $el->GetData('Is'); #my $pIc = $el->GetData('Ic'); if($FitTo eq 'Eps') { $S2 += ($pObsEps1->[$i] - $e1c)**2 + ($pObsEps2->[$i] - $e2c)**2; } elsif($FitTo eq 'PsiDelta') { my $dPsi = $pObsPsi->[$i] - $Psi; my $dDelta = $pObsDelta->[$i] - $Delta; $dDelta -= 360.0 if($dDelta > 180.0); $dDelta += 360.0 if($dDelta <= -180.0); $S2 += $dPsi*$dPsi + $dDelta*$dDelta; } elsif($FitTo eq 'IsIcII') { my ($Iso, $Ico) = $el->PsiDeltaToIsIcConfigrationII($pObsPsi->[$i], $pObsDelta->[$i]); ($Is[$c], $Ic[$c]) = $el->PsiDeltaToIsIcConfigrationII($Psi, $Delta); #print "Is=($Iso,$pIs->[$i],$Is[$c])\n"; #print "Ic=($Ico,$pIc->[$i],$Ic[$c])\n"; my $ds = $Iso - $Is[$c]; my $dc = $Ico - $Ic[$c]; $S2 += $ds*$ds + $dc*$dc; } elsif($FitTo eq 'IsIcIII') { my ($Iso, $Ico) = $el->PsiDeltaToIsIcConfigrationIII($pObsPsi->[$i], $pObsDelta->[$i]); ($Is[$c], $Ic[$c]) = $el->PsiDeltaToIsIcConfigrationIII($Psi, -$Delta); my $ds = $Iso - $Is[$c]; my $dc = $Ico - $Ic[$c]; $S2 += $ds*$ds + $dc*$dc; } else { print "Error: Invalid Fitting Target [$FitTo].\n"; exit; } $c++; } $S2 = sqrt($S2 / $c); return (\@E, \@e1, \@e2, \@Psi, \@Delta, \@Is, \@Ic, $S2); } sub CreateGraphFrame { my ($this, $canvas, $TargetData) = @_; $canvas = $this->Canvas(); my $App = $this->App(); my $font = $App->{'GraphFrameFont'}; my @font = split(/,/, $font) if($font); my $w = $canvas->width(); my $h = $canvas->height(); my $GraphFrameArray = $this->{'GraphFrameArray'} = new GraphFrameArray($this->mw()); $GraphFrameArray->SetCanvasSize($w, $h); $GraphFrameArray->AddGraphFrame(); my $GraphFrame0 = $GraphFrameArray->GetGraphFrame(0); my $FramePosStr0 = $App->{"GraphFrame0Position"}; my $XScale0 = $GraphFrame0->GetXScale(0); my $YScale0 = $GraphFrame0->GetYScale(0); $GraphFrame0->SetPositionByStr($FramePosStr0); $XScale0->SetScaleStringVisible(1); $XScale0->SetCaptionVisible(1); $GraphFrame0->SetViewRange(0, 0, 1, 1); } sub AssignGraphData { my ($this, $ResetViewRange) = @_; $ResetViewRange = 1 if(!defined $ResetViewRange); my $GraphFrameArray = $this->GetGraphFrameArray(); my $GraphFrame0 = $GraphFrameArray->GetGraphFrame(0); $GraphFrame0->ClearAllData(); my $XLabel = $this->{"ChooseXListBox"}->GetText(); $XLabel = 'X' if(!$XLabel); my $Y1Label = $this->{"ChooseY1ListBox"}->GetText(); $Y1Label = 'Y1' if(!$Y1Label); my $Y2Label = $this->{"ChooseY2ListBox"}->GetText(); $Y2Label = 'Y2' if(!$Y2Label); $GraphFrame0->SetXCaption($XLabel); $GraphFrame0->SetYCaption("$Y1Label,$Y2Label"); my $pX = $this->{Ellipsometry}->GetData($XLabel, '.*E.*', '.*eV.*'); my $pY1 = $this->{Ellipsometry}->GetData($Y1Label); my $pY2 = $this->{Ellipsometry}->GetData($Y2Label); my $nData = $this->{Ellipsometry}->nData(); if($pX) { $GraphFrame0->AddGraphData($pX, $pY1, 2, "black", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y1Label}(obs)") if($pY1); $GraphFrame0->AddGraphData($pX, $pY2, 2, "red", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y2Label}(obs)") if($pY2); } my $pCalE = $this->{pEArray}; my $pCalY1 = $this->{"p${Y1Label}Array"}; my $pCalY2 = $this->{"p${Y2Label}Array"}; if($pCalE) { $GraphFrame0->AddGraphData($pCalE, $pCalY1, 0, "black", "circle", 3, "", 1, "black", "XAutoSkip", "Energy", "${Y1Label}(cal)") if($pCalY1); # 1, "black", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y1Label}(cal)") if($pCalY1); $GraphFrame0->AddGraphData($pCalE, $pCalY2, 0, "red", "circle", 3, "", 1, "red", "XAutoSkip", "Energy", "${Y2Label}(cal)") if($pCalY2); # 1, "red", "", 6, "red", 0, "red", "XAutoSkip", "Energy", "${Y2Label}(cal)") if($pCalY2); } $GraphFrame0->SetYScalePlotType('x'); if($ResetViewRange) { $GraphFrame0->CalMinMax(); $GraphFrame0->AdjustViewRange(0.05, 0.05, 0.05, 0.05); } }