v ATLAS # This file was created by ATLAS version 5.38.0.R on Thu Nov 21 16:36:55 2024. #SSF 2.0 generic ############################################################################## # Copyright (c) 1984 - 2024 # # Silvaco Inc. All rights reserved # # # # This file format and the following Key are copyright Silvaco Inc. # # You may not use, this format or key without reproducing this message in # # full and obtaining express written permission from Silvaco Inc. # # # # To obtain such permission please contact: Silvaco Inc. # # support@silvaco.com # # # # KEY=SVC86hn7562asdx PROD=345 # ############################################################################## p 7 210 76 75 205 79 78 206 d 2.799234e+000 2.700234e+019 2.237867e+018 2.924020e+019 0.000000e+000 0.000000e+000 0.000000e+000 d 2.799234e+000 2.700234e+019 2.237867e+018 2.924020e+019 0.000000e+000 0.000000e+000 0.000000e+000 d 2.777193e+000 6.903864e+018 2.235955e+018 9.139820e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.777193e+000 6.903864e+018 2.235955e+018 9.139820e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.755152e+000 1.765156e+018 2.230230e+018 3.995386e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.755152e+000 1.765156e+018 2.230230e+018 3.995386e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.733110e+000 4.513091e+017 2.220720e+018 2.672029e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.733110e+000 4.513091e+017 2.220720e+018 2.672029e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.711069e+000 1.153891e+017 2.207474e+018 2.322863e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.711069e+000 1.153891e+017 2.207474e+018 2.322863e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.689028e+000 2.950230e+016 2.190559e+018 2.220061e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.689028e+000 2.950230e+016 2.190559e+018 2.220061e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.666987e+000 7.543046e+015 2.170061e+018 2.177604e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.666987e+000 7.543046e+015 2.170061e+018 2.177604e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.644946e+000 1.928580e+015 2.146084e+018 2.148013e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.644946e+000 1.928580e+015 2.146084e+018 2.148013e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.622904e+000 4.930927e+014 2.118747e+018 2.119240e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.622904e+000 4.930927e+014 2.118747e+018 2.119240e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.600863e+000 1.260722e+014 2.088186e+018 2.088312e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.600863e+000 1.260722e+014 2.088186e+018 2.088312e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.578822e+000 3.223371e+013 2.054550e+018 2.054583e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.578822e+000 3.223371e+013 2.054550e+018 2.054583e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.556781e+000 8.241404e+012 2.018004e+018 2.018013e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.556781e+000 8.241404e+012 2.018004e+018 2.018013e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.534740e+000 2.107134e+012 1.978723e+018 1.978725e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.534740e+000 2.107134e+012 1.978723e+018 1.978725e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.512698e+000 5.387447e+011 1.936893e+018 1.936894e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.512698e+000 5.387447e+011 1.936893e+018 1.936894e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.490657e+000 1.377444e+011 1.892710e+018 1.892710e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.490657e+000 1.377444e+011 1.892710e+018 1.892710e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.468616e+000 3.521801e+010 1.846375e+018 1.846375e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.468616e+000 3.521801e+010 1.846375e+018 1.846375e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.446575e+000 9.004419e+009 1.798098e+018 1.798098e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.446575e+000 9.004419e+009 1.798098e+018 1.798098e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.424533e+000 2.302219e+009 1.748094e+018 1.748094e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.424533e+000 2.302219e+009 1.748094e+018 1.748094e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.402492e+000 5.886234e+008 1.696577e+018 1.696577e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.402492e+000 5.886234e+008 1.696577e+018 1.696577e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.380451e+000 1.504972e+008 1.643766e+018 1.643766e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.380451e+000 1.504972e+008 1.643766e+018 1.643766e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.358410e+000 3.847860e+007 1.589880e+018 1.589880e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.358410e+000 3.847860e+007 1.589880e+018 1.589880e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.336369e+000 9.838077e+006 1.535133e+018 1.535133e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.336369e+000 9.838077e+006 1.535133e+018 1.535133e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.314327e+000 2.515366e+006 1.479740e+018 1.479740e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.314327e+000 2.515366e+006 1.479740e+018 1.479740e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.292286e+000 6.431200e+005 1.423910e+018 1.423910e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.292286e+000 6.431200e+005 1.423910e+018 1.423910e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.270245e+000 1.644307e+005 1.367847e+018 1.367847e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.270245e+000 1.644307e+005 1.367847e+018 1.367847e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.248204e+000 4.204107e+004 1.311746e+018 1.311746e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.248204e+000 4.204107e+004 1.311746e+018 1.311746e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.226163e+000 1.074892e+004 1.255798e+018 1.255798e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.226163e+000 1.074892e+004 1.255798e+018 1.255798e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.204121e+000 2.748246e+003 1.200183e+018 1.200183e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.204121e+000 2.748246e+003 1.200183e+018 1.200183e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.182080e+000 7.026620e+002 1.145072e+018 1.145072e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.182080e+000 7.026620e+002 1.145072e+018 1.145072e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.160039e+000 1.796542e+002 1.090626e+018 1.090626e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.160039e+000 1.796542e+002 1.090626e+018 1.090626e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.137998e+000 4.593337e+001 1.036995e+018 1.036995e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.137998e+000 4.593337e+001 1.036995e+018 1.036995e+018 0.000000e+000 0.000000e+000 0.000000e+000 d 2.115956e+000 1.174408e+001 9.843169e+017 9.843169e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.115956e+000 1.174408e+001 9.843169e+017 9.843169e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.093915e+000 3.002687e+000 9.327192e+017 9.327192e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.093915e+000 3.002687e+000 9.327192e+017 9.327192e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.071874e+000 7.677167e-001 8.823167e+017 8.823167e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.071874e+000 7.677167e-001 8.823167e+017 8.823167e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.049833e+000 1.962872e-001 8.332125e+017 8.332125e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.049833e+000 1.962872e-001 8.332125e+017 8.332125e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.027792e+000 5.018602e-002 7.854973e+017 7.854973e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.027792e+000 5.018602e-002 7.854973e+017 7.854973e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.005750e+000 1.283139e-002 7.392499e+017 7.392499e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 2.005750e+000 1.283139e-002 7.392499e+017 7.392499e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.983709e+000 3.280685e-003 6.945371e+017 6.945371e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.983709e+000 3.280685e-003 6.945371e+017 6.945371e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.961668e+000 8.387943e-004 6.514143e+017 6.514143e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.961668e+000 8.387943e-004 6.514143e+017 6.514143e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.939627e+000 2.144600e-004 6.099256e+017 6.099256e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.939627e+000 2.144600e-004 6.099256e+017 6.099256e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.917586e+000 5.483240e-005 5.701039e+017 5.701039e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.917586e+000 5.483240e-005 5.701039e+017 5.701039e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.895544e+000 1.401936e-005 5.319720e+017 5.319720e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.895544e+000 1.401936e-005 5.319720e+017 5.319720e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.873503e+000 3.584421e-006 4.955429e+017 4.955429e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.873503e+000 3.584421e-006 4.955429e+017 4.955429e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.851462e+000 9.164525e-007 4.608200e+017 4.608200e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.851462e+000 9.164525e-007 4.608200e+017 4.608200e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.829421e+000 2.343154e-007 4.277984e+017 4.277984e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.829421e+000 2.343154e-007 4.277984e+017 4.277984e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.807379e+000 5.990896e-008 3.964647e+017 3.964647e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.807379e+000 5.990896e-008 3.964647e+017 3.964647e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.785338e+000 1.531732e-008 3.667985e+017 3.667985e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.785338e+000 1.531732e-008 3.667985e+017 3.667985e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.763297e+000 3.916278e-009 3.387726e+017 3.387726e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.763297e+000 3.916278e-009 3.387726e+017 3.387726e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.741256e+000 1.001301e-009 3.123537e+017 3.123537e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.741256e+000 1.001301e-009 3.123537e+017 3.123537e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.719215e+000 2.560091e-010 2.875032e+017 2.875032e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.719215e+000 2.560091e-010 2.875032e+017 2.875032e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.697173e+000 6.545551e-011 2.641778e+017 2.641778e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.697173e+000 6.545551e-011 2.641778e+017 2.641778e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.675132e+000 1.673544e-011 2.423302e+017 2.423302e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.675132e+000 1.673544e-011 2.423302e+017 2.423302e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.653091e+000 4.278860e-012 2.219098e+017 2.219098e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.653091e+000 4.278860e-012 2.219098e+017 2.219098e+017 0.000000e+000 0.000000e+000 0.000000e+000 d 1.631050e+000 1.094004e-012 2.028632e+017 2.028632e+017 1.052339e-281 0.000000e+000 1.052339e-281 d 1.631050e+000 1.094004e-012 2.028632e+017 2.028632e+017 1.052339e-281 0.000000e+000 1.052339e-281 d 1.609009e+000 2.797112e-013 1.851345e+017 1.851345e+017 1.204432e-277 0.000000e+000 1.204432e-277 d 1.609009e+000 2.797112e-013 1.851345e+017 1.851345e+017 1.204432e-277 0.000000e+000 1.204432e-277 d 1.586967e+000 7.151559e-014 1.686667e+017 1.686667e+017 1.378508e-273 0.000000e+000 1.378508e-273 d 1.586967e+000 7.151559e-014 1.686667e+017 1.686667e+017 1.378508e-273 0.000000e+000 1.378508e-273 d 1.564926e+000 1.828486e-014 1.534012e+017 1.534012e+017 1.577742e-269 0.000000e+000 1.577742e-269 d 1.564926e+000 1.828486e-014 1.534012e+017 1.534012e+017 1.577742e-269 0.000000e+000 1.577742e-269 d 1.542885e+000 4.675010e-015 1.392791e+017 1.392791e+017 1.805772e-265 0.000000e+000 1.805772e-265 d 1.542885e+000 4.675010e-015 1.392791e+017 1.392791e+017 1.805772e-265 0.000000e+000 1.805772e-265 d 1.520844e+000 1.195290e-015 1.262411e+017 1.262411e+017 2.066758e-261 0.000000e+000 2.066758e-261 d 1.520844e+000 1.195290e-015 1.262411e+017 1.262411e+017 2.066758e-261 0.000000e+000 2.066758e-261 d 1.498802e+000 3.056077e-016 1.142282e+017 1.142282e+017 2.365465e-257 0.000000e+000 2.365465e-257 d 1.498802e+000 3.056077e-016 1.142282e+017 1.142282e+017 2.365465e-257 0.000000e+000 2.365465e-257 d 1.476761e+000 7.813673e-017 1.031819e+017 1.031819e+017 2.707343e-253 0.000000e+000 2.707343e-253 d 1.476761e+000 7.813673e-017 1.031819e+017 1.031819e+017 2.707343e-253 0.000000e+000 2.707343e-253 d 1.454720e+000 1.997773e-017 9.304465e+016 9.304465e+016 3.098633e-249 0.000000e+000 3.098633e-249 d 1.454720e+000 1.997773e-017 9.304465e+016 9.304465e+016 3.098633e-249 0.000000e+000 3.098633e-249 d 1.432679e+000 5.107837e-018 8.376003e+016 8.376003e+016 3.546476e-245 0.000000e+000 3.546476e-245 d 1.432679e+000 5.107837e-018 8.376003e+016 8.376003e+016 3.546476e-245 0.000000e+000 3.546476e-245 d 1.410638e+000 1.305954e-018 7.527313e+016 7.527313e+016 4.059044e-241 0.000000e+000 4.059044e-241 d 1.410638e+000 1.305954e-018 7.527313e+016 7.527313e+016 4.059044e-241 0.000000e+000 4.059044e-241 d 1.388596e+000 3.339018e-019 6.753061e+016 6.753061e+016 4.645694e-237 0.000000e+000 4.645694e-237 d 1.388596e+000 3.339018e-019 6.753061e+016 6.753061e+016 4.645694e-237 0.000000e+000 4.645694e-237 d 1.366555e+000 8.537087e-020 6.048102e+016 6.048102e+016 5.317132e-233 0.000000e+000 5.317132e-233 d 1.366555e+000 8.537087e-020 6.048102e+016 6.048102e+016 5.317132e-233 0.000000e+000 5.317132e-233 d 1.344514e+000 2.182733e-020 5.407483e+016 5.407483e+016 6.085612e-229 0.000000e+000 6.085612e-229 d 1.344514e+000 2.182733e-020 5.407483e+016 5.407483e+016 6.085612e-229 0.000000e+000 6.085612e-229 d 1.322473e+000 5.580736e-021 4.826461e+016 4.826461e+016 6.965159e-225 0.000000e+000 6.965159e-225 d 1.322473e+000 5.580736e-021 4.826461e+016 4.826461e+016 6.965159e-225 0.000000e+000 6.965159e-225 d 1.300432e+000 1.426863e-021 4.300512e+016 4.300512e+016 7.971827e-221 0.000000e+000 7.971827e-221 d 1.300432e+000 1.426863e-021 4.300512e+016 4.300512e+016 7.971827e-221 0.000000e+000 7.971827e-221 d 1.278390e+000 3.648155e-022 3.825333e+016 3.825333e+016 9.123988e-217 0.000000e+000 9.123988e-217 d 1.278390e+000 3.648155e-022 3.825333e+016 3.825333e+016 9.123988e-217 0.000000e+000 9.123988e-217 d 1.256349e+000 9.327477e-023 3.396846e+016 3.396846e+016 1.044267e-212 0.000000e+000 1.044267e-212 d 1.256349e+000 9.327477e-023 3.396846e+016 3.396846e+016 1.044267e-212 0.000000e+000 1.044267e-212 d 1.234308e+000 2.384817e-023 3.011204e+016 3.011204e+016 1.195194e-208 0.000000e+000 1.195194e-208 d 1.234308e+000 2.384817e-023 3.011204e+016 3.011204e+016 1.195194e-208 0.000000e+000 1.195194e-208 d 1.212267e+000 6.097418e-024 2.664784e+016 2.664784e+016 1.367934e-204 0.000000e+000 1.367934e-204 d 1.212267e+000 6.097418e-024 2.664784e+016 2.664784e+016 1.367934e-204 0.000000e+000 1.367934e-204 d 1.190226e+000 1.558967e-024 2.354191e+016 2.354191e+016 1.565640e-200 0.000000e+000 1.565640e-200 d 1.190226e+000 1.558967e-024 2.354191e+016 2.354191e+016 1.565640e-200 0.000000e+000 1.565640e-200 d 1.168184e+000 3.985913e-025 2.076247e+016 2.076247e+016 1.791921e-196 0.000000e+000 1.791921e-196 d 1.168184e+000 3.985913e-025 2.076247e+016 2.076247e+016 1.791921e-196 0.000000e+000 1.791921e-196 d 1.146143e+000 1.019104e-025 1.827990e+016 1.827990e+016 2.050905e-192 0.000000e+000 2.050905e-192 d 1.146143e+000 1.019104e-025 1.827990e+016 1.827990e+016 2.050905e-192 0.000000e+000 2.050905e-192 d 1.124102e+000 2.605611e-026 1.606669e+016 1.606669e+016 2.347321e-188 0.000000e+000 2.347321e-188 d 1.124102e+000 2.605611e-026 1.606669e+016 1.606669e+016 2.347321e-188 0.000000e+000 2.347321e-188 d 1.102061e+000 6.661936e-027 1.409732e+016 1.409732e+016 2.686577e-184 0.000000e+000 2.686577e-184 d 1.102061e+000 6.661936e-027 1.409732e+016 1.409732e+016 2.686577e-184 0.000000e+000 2.686577e-184 d 1.080019e+000 1.703301e-027 1.234822e+016 1.234822e+016 3.074865e-180 0.000000e+000 3.074865e-180 d 1.080019e+000 1.703301e-027 1.234822e+016 1.234822e+016 3.074865e-180 0.000000e+000 3.074865e-180 d 1.057978e+000 4.354941e-028 1.079767e+016 1.079767e+016 3.519272e-176 0.000000e+000 3.519272e-176 d 1.057978e+000 4.354941e-028 1.079767e+016 1.079767e+016 3.519272e-176 0.000000e+000 3.519272e-176 d 1.035937e+000 1.113456e-028 9.425688e+015 9.425688e+015 4.027909e-172 0.000000e+000 4.027909e-172 d 1.035937e+000 1.113456e-028 9.425688e+015 9.425688e+015 4.027909e-172 0.000000e+000 4.027909e-172 d 1.013896e+000 2.846847e-029 8.213984e+015 8.213984e+015 4.610059e-168 0.000000e+000 4.610059e-168 d 1.013896e+000 2.846847e-029 8.213984e+015 8.213984e+015 4.610059e-168 0.000000e+000 4.610059e-168 d 9.918546e-001 7.278719e-030 7.145823e+015 7.145823e+015 5.276346e-164 0.000000e+000 5.276346e-164 d 9.918546e-001 7.278719e-030 7.145823e+015 7.145823e+015 5.276346e-164 0.000000e+000 5.276346e-164 d 9.698134e-001 1.860998e-030 6.205951e+015 6.205951e+015 6.038932e-160 0.000000e+000 6.038932e-160 d 9.698134e-001 1.860998e-030 6.205951e+015 6.205951e+015 6.038932e-160 0.000000e+000 6.038932e-160 d 9.477722e-001 4.758135e-031 5.380494e+015 5.380494e+015 6.911733e-156 0.000000e+000 6.911733e-156 d 9.477722e-001 4.758135e-031 5.380494e+015 5.380494e+015 6.911733e-156 0.000000e+000 6.911733e-156 d 9.257310e-001 1.216544e-031 4.656864e+015 4.656864e+015 7.910679e-152 0.000000e+000 7.910679e-152 d 9.257310e-001 1.216544e-031 4.656864e+015 4.656864e+015 7.910679e-152 0.000000e+000 7.910679e-152 d 9.036897e-001 3.110417e-032 4.023672e+015 4.023672e+015 9.054002e-148 0.000000e+000 9.054002e-148 d 9.036897e-001 3.110417e-032 4.023672e+015 4.023672e+015 9.054002e-148 0.000000e+000 9.054002e-148 d 8.816485e-001 7.952606e-033 3.470637e+015 3.470637e+015 1.036257e-143 0.000000e+000 1.036257e-143 d 8.816485e-001 7.952606e-033 3.470637e+015 3.470637e+015 1.036257e-143 0.000000e+000 1.036257e-143 d 8.596073e-001 2.033295e-033 2.988502e+015 2.988502e+015 1.186026e-139 0.000000e+000 1.186026e-139 d 8.596073e-001 2.033295e-033 2.988502e+015 2.988502e+015 1.186026e-139 0.000000e+000 1.186026e-139 d 8.375661e-001 5.198658e-034 2.568950e+015 2.568950e+015 1.357441e-135 0.000000e+000 1.357441e-135 d 8.375661e-001 5.198658e-034 2.568950e+015 2.568950e+015 1.357441e-135 0.000000e+000 1.357441e-135 d 8.155249e-001 1.329175e-034 2.204526e+015 2.204526e+015 1.553631e-131 0.000000e+000 1.553631e-131 d 8.155249e-001 1.329175e-034 2.204526e+015 2.204526e+015 1.553631e-131 0.000000e+000 1.553631e-131 d 7.934837e-001 3.398389e-035 1.888567e+015 1.888567e+015 1.778176e-127 0.000000e+000 1.778176e-127 d 7.934837e-001 3.398389e-035 1.888567e+015 1.888567e+015 1.778176e-127 0.000000e+000 1.778176e-127 d 7.714425e-001 8.688883e-036 1.615130e+015 1.615130e+015 2.035174e-123 0.000000e+000 2.035174e-123 d 7.714425e-001 8.688883e-036 1.615130e+015 1.615130e+015 2.035174e-123 0.000000e+000 2.035174e-123 d 7.494012e-001 2.221544e-036 1.378923e+015 1.378923e+015 2.329315e-119 0.000000e+000 2.329315e-119 d 7.494012e-001 2.221544e-036 1.378923e+015 1.378923e+015 2.329315e-119 0.000000e+000 2.329315e-119 d 7.273600e-001 5.679966e-037 1.175250e+015 1.175250e+015 2.665969e-115 0.000000e+000 2.665969e-115 d 7.273600e-001 5.679966e-037 1.175250e+015 1.175250e+015 2.665969e-115 0.000000e+000 2.665969e-115 d 7.053188e-001 1.452234e-037 9.999497e+014 9.999497e+014 3.051279e-111 0.000000e+000 3.051279e-111 d 7.053188e-001 1.452234e-037 9.999497e+014 9.999497e+014 3.051279e-111 0.000000e+000 3.051279e-111 d 6.832776e-001 3.713022e-038 8.493441e+014 8.493441e+014 3.492277e-107 0.000000e+000 3.492277e-107 d 6.832776e-001 3.713022e-038 8.493441e+014 8.493441e+014 3.492277e-107 0.000000e+000 3.492277e-107 d 6.612364e-001 9.493327e-039 7.201897e+014 7.201897e+014 3.997013e-103 0.000000e+000 3.997013e-103 d 6.612364e-001 9.493327e-039 7.201897e+014 7.201897e+014 3.997013e-103 0.000000e+000 3.997013e-103 d 6.391952e-001 2.427221e-039 6.096319e+014 6.096319e+014 4.574697e-099 0.000000e+000 4.574697e-099 d 6.391952e-001 2.427221e-039 6.096319e+014 6.096319e+014 4.574697e-099 0.000000e+000 4.574697e-099 d 6.171540e-001 6.205835e-040 5.151648e+014 5.151648e+014 5.235874e-095 0.000000e+000 5.235874e-095 d 6.171540e-001 6.205835e-040 5.151648e+014 5.151648e+014 5.235874e-095 0.000000e+000 5.235874e-095 d 5.951128e-001 1.586686e-040 4.345926e+014 4.345926e+014 5.992610e-091 0.000000e+000 5.992610e-091 d 5.951128e-001 1.586686e-040 4.345926e+014 4.345926e+014 5.992610e-091 0.000000e+000 5.992610e-091 d 5.730715e-001 4.056785e-041 3.659958e+014 3.659958e+014 6.858716e-087 0.000000e+000 6.858716e-087 d 5.730715e-001 4.056785e-041 3.659958e+014 3.659958e+014 6.858716e-087 0.000000e+000 6.858716e-087 d 5.510303e-001 1.037225e-041 3.077000e+014 3.077000e+014 7.850000e-083 0.000000e+000 7.850000e-083 d 5.510303e-001 1.037225e-041 3.077000e+014 3.077000e+014 7.850000e-083 0.000000e+000 7.850000e-083 d 5.289891e-001 2.651941e-042 2.582478e+014 2.582478e+014 8.984553e-079 0.000000e+000 8.984553e-079 d 5.289891e-001 2.651941e-042 2.582478e+014 2.582478e+014 8.984553e-079 0.000000e+000 8.984553e-079 d 5.069479e-001 6.780391e-043 2.163732e+014 2.163732e+014 1.028308e-074 0.000000e+000 1.028308e-074 d 5.069479e-001 6.780391e-043 2.163732e+014 2.163732e+014 1.028308e-074 0.000000e+000 1.028308e-074 d 4.849067e-001 1.733587e-043 1.809788e+014 1.809788e+014 1.176929e-070 0.000000e+000 1.176929e-070 d 4.849067e-001 1.733587e-043 1.809788e+014 1.809788e+014 1.176929e-070 0.000000e+000 1.176929e-070 d 4.628655e-001 4.432375e-044 1.511158e+014 1.511158e+014 1.347029e-066 0.000000e+000 1.347029e-066 d 4.628655e-001 4.432375e-044 1.511158e+014 1.511158e+014 1.347029e-066 0.000000e+000 1.347029e-066 d 4.408243e-001 1.133254e-044 1.259649e+014 1.259649e+014 1.541714e-062 0.000000e+000 1.541714e-062 d 4.408243e-001 1.133254e-044 1.259649e+014 1.259649e+014 1.541714e-062 0.000000e+000 1.541714e-062 d 4.187830e-001 2.897466e-045 1.048206e+014 1.048206e+014 1.764536e-058 0.000000e+000 1.764536e-058 d 4.187830e-001 2.897466e-045 1.048206e+014 1.048206e+014 1.764536e-058 0.000000e+000 1.764536e-058 d 3.967418e-001 7.408140e-046 8.707667e+013 8.707667e+013 2.019563e-054 0.000000e+000 2.019563e-054 d 3.967418e-001 7.408140e-046 8.707667e+013 8.707667e+013 2.019563e-054 0.000000e+000 2.019563e-054 d 3.747006e-001 1.894088e-046 7.221284e+013 7.221284e+013 2.311448e-050 0.000000e+000 2.311448e-050 d 3.747006e-001 1.894088e-046 7.221284e+013 7.221284e+013 2.311448e-050 0.000000e+000 2.311448e-050 d 3.526594e-001 4.842738e-047 5.978396e+013 5.978396e+013 2.645520e-046 0.000000e+000 2.645520e-046 d 3.526594e-001 4.842738e-047 5.978396e+013 5.978396e+013 2.645520e-046 0.000000e+000 2.645520e-046 d 3.306182e-001 1.238175e-047 4.940975e+013 4.940975e+013 3.027874e-042 0.000000e+000 3.027874e-042 d 3.306182e-001 1.238175e-047 4.940975e+013 4.940975e+013 3.027874e-042 0.000000e+000 3.027874e-042 d 3.085770e-001 3.165722e-048 4.076601e+013 4.076601e+013 3.465490e-038 0.000000e+000 3.465490e-038 d 3.085770e-001 3.165722e-048 4.076601e+013 4.076601e+013 3.465490e-038 0.000000e+000 3.465490e-038 d 2.865358e-001 8.094009e-049 3.357697e+013 3.357697e+013 3.966354e-034 0.000000e+000 3.966354e-034 d 2.865358e-001 8.094009e-049 3.357697e+013 3.357697e+013 3.966354e-034 0.000000e+000 3.966354e-034 d 2.644946e-001 2.069448e-049 2.760847e+013 2.760847e+013 4.539607e-030 0.000000e+000 4.539607e-030 d 2.644946e-001 2.069448e-049 2.760847e+013 2.760847e+013 4.539607e-030 0.000000e+000 4.539607e-030 d 2.424533e-001 5.291094e-050 2.266214e+013 2.266214e+013 5.195712e-026 0.000000e+000 5.195712e-026 d 2.424533e-001 5.291094e-050 2.266214e+013 2.266214e+013 5.195712e-026 0.000000e+000 5.195712e-026 d 2.204121e-001 1.352809e-050 1.857022e+013 1.857022e+013 5.946643e-022 0.000000e+000 5.946643e-022 d 2.204121e-001 1.352809e-050 1.857022e+013 1.857022e+013 5.946643e-022 0.000000e+000 5.946643e-022 d 1.983709e-001 3.458815e-051 1.519116e+013 1.519116e+013 6.806106e-018 0.000000e+000 6.806106e-018 d 1.983709e-001 3.458815e-051 1.519116e+013 1.519116e+013 6.806106e-018 0.000000e+000 6.806106e-018 d 1.763297e-001 8.843378e-052 1.240573e+013 1.240573e+013 7.789786e-014 0.000000e+000 7.789786e-014 d 1.763297e-001 8.843378e-052 1.240573e+013 1.240573e+013 7.789786e-014 0.000000e+000 7.789786e-014 d 1.542885e-001 2.261044e-052 1.011373e+013 1.011373e+013 8.915636e-010 0.000000e+000 8.915636e-010 d 1.542885e-001 2.261044e-052 1.011373e+013 1.011373e+013 8.915636e-010 0.000000e+000 8.915636e-010 d 1.322473e-001 5.780960e-053 8.231107e+012 8.231107e+012 1.020420e-005 0.000000e+000 1.020420e-005 d 1.322473e-001 5.780960e-053 8.231107e+012 8.231107e+012 1.020420e-005 0.000000e+000 1.020420e-005 d 1.102061e-001 1.478056e-053 6.687483e+012 6.687483e+012 1.167901e-001 0.000000e+000 1.167901e-001 d 1.102061e-001 1.478056e-053 6.687483e+012 6.687483e+012 1.167901e-001 0.000000e+000 1.167901e-001 d 8.816485e-002 3.779042e-054 5.424063e+012 5.424063e+012 1.336696e+003 0.000000e+000 1.336696e+003 d 8.816485e-002 3.779042e-054 5.424063e+012 5.424063e+012 1.336696e+003 0.000000e+000 1.336696e+003 d 6.612364e-002 9.662125e-055 4.391820e+012 4.391820e+012 1.529888e+007 0.000000e+000 1.529888e+007 d 6.612364e-002 9.662125e-055 4.391820e+012 4.391820e+012 1.529888e+007 0.000000e+000 1.529888e+007 d 4.408243e-002 2.470379e-055 3.549947e+012 3.549947e+012 1.751001e+011 0.000000e+000 1.751001e+011 d 4.408243e-002 2.470379e-055 3.549947e+012 3.549947e+012 1.751001e+011 0.000000e+000 1.751001e+011 d 2.204121e-002 6.316179e-056 2.864553e+012 2.864553e+012 2.004072e+015 0.000000e+000 2.004072e+015 d 2.204121e-002 6.316179e-056 2.864553e+012 2.864553e+012 2.004072e+015 0.000000e+000 2.004072e+015 d 0.000000e+000 1.614899e-056 2.307542e+012 2.307542e+012 2.293718e+019 0.000000e+000 2.293718e+019 d 0.000000e+000 1.614899e-056 2.307542e+012 2.307542e+012 2.293718e+019 0.000000e+000 2.293718e+019